Silicon Vibrating Micro-Wire Resonators for Study of Quantum Turbulence in Superfluid 4He

We report a fabrication process and characterization measurements of single crystal silicon micro-wire resonators to be used for study of quantum turbulence in superfluid 4 He at millikelvin temperatures. Our devices are single standing goal-post-shaped silicon structures with a width and height of...

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Veröffentlicht in:Journal of low temperature physics 2022, Vol.208 (5-6), p.475-481
Hauptverfasser: Midlik, Šimon, Sadílek, Jakub, Xie, Zhuolin, Huang, Yunhu, Schmoranzer, David
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container_issue 5-6
container_start_page 475
container_title Journal of low temperature physics
container_volume 208
creator Midlik, Šimon
Sadílek, Jakub
Xie, Zhuolin
Huang, Yunhu
Schmoranzer, David
description We report a fabrication process and characterization measurements of single crystal silicon micro-wire resonators to be used for study of quantum turbulence in superfluid 4 He at millikelvin temperatures. Our devices are single standing goal-post-shaped silicon structures with a width and height of the order of 7 microns. Vapour-deposited superconducting aluminium film of 120 nm thickness is used for magneto-motive drive of the resonators. In the window of each chip, two such devices of different dimensions are placed 30 µm to 1 mm apart, with the intent to study interaction due to pinned quantized vortices. With resonant frequencies below 10 kHz, the devices reach quality factors of ≈ 2 × 10 4 in cold helium vapour.
doi_str_mv 10.1007/s10909-022-02675-2
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subjects Aluminum
Characterization and Evaluation of Materials
Condensed Matter Physics
Fluids
Low temperature physics
Magnetic Materials
Magnetism
Physics
Physics and Astronomy
Quantum turbulence
Resonant frequencies
Resonators
Silicon
Single crystals
Superfluidity
Thickness
Vapor deposition
Wire
title Silicon Vibrating Micro-Wire Resonators for Study of Quantum Turbulence in Superfluid 4He
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