UV Photodetection from a p–n Junction-Based GLAD-Fabricated Au/n-TiO2 NW/p-Si Device
Glancing-angle deposition technique was adopted to fabricate a vertical titanium dioxide (TiO 2 ) nanowire (NW) array over p-type Si substrate. The structural formation of the TiO 2 NW array was studied using transmission electron microscopy. Moreover, X-ray diffraction characteristics confirmed tha...
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Veröffentlicht in: | Journal of electronic materials 2022-09, Vol.51 (9), p.5454-5461 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Glancing-angle deposition technique was adopted to fabricate a vertical titanium dioxide (TiO
2
) nanowire (NW) array over p-type Si substrate. The structural formation of the TiO
2
NW array was studied using transmission electron microscopy. Moreover, X-ray diffraction characteristics confirmed that the fabricated TiO
2
NWs were crystalline in nature. The recombination states of the synthesized TiO
2
NW array were also studied using photoluminescence characterization. The Au/TiO
2
/p-Si device showed a very low dark current of 0.163
µ
A/cm
2
at +0.5-V applied voltage. Under exposure of light, a significant amount of electron–hole pairs were generated and separated by an external electric field. The device also exhibited a large responsivity, low noise-equivalent power and high detectivity of 19.8 A/W, 3.9 × 10
−14
W and 8.7 × 10
13
Jones, respectively, at 400 nm of illumination with low light power density of 1.07
µ
W/cm
2
. Moreover, the fabricated device gave a fall time and rise time of 75 ms and 350 ms, respectively The fabricated Au/TiO
2
/p-Si device formed a good-quality p–n junction between TiO
2
(n-type) and p-Si, making it a promising candidate for photodetector application. |
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ISSN: | 0361-5235 1543-186X |
DOI: | 10.1007/s11664-022-09790-6 |