Scanning electron microscope fine tuning using four-bar piezoelectric actuated mechanism
Scanning Electron Microscopes are extensively used for accurate micro/nano images exploring. Several strategies have been proposed to fine tune those microscopes in the past few years. This work presents a new fine tuning strategy of a scanning electron microscope sample table using four bar piezoel...
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| Veröffentlicht in: | Journal of Electrical Engineering 2018-01, Vol.69 (1), p.24-31 |
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| container_title | Journal of Electrical Engineering |
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| creator | Hatamleh, Khaled S. Khasawneh, Qais A. Al-Ghasem, Adnan Jaradat, Mohammad A. Sawaqed, Laith Al-Shabi, Mohammad |
| description | Scanning Electron Microscopes are extensively used for accurate micro/nano images exploring. Several strategies have been proposed to fine tune those microscopes in the past few years. This work presents a new fine tuning strategy of a scanning electron microscope sample table using four bar piezoelectric actuated mechanisms. The introduced paper presents an algorithm to find all possible inverse kinematics solutions of the proposed mechanism. In addition, another algorithm is presented to search for the optimal inverse kinematic solution. Both algorithms are used simultaneously by means of a simulation study to fine tune a scanning electron microscope sample table through a pre-specified circular or linear path of motion. Results of the study shows that, proposed algorithms were able to minimize the power required to drive the piezoelectric actuated mechanism by a ratio of 97.5% for all simulated paths of motion when compared to general non-optimized solution. |
| doi_str_mv | 10.1515/jee-2018-0003 |
| format | Article |
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Several strategies have been proposed to fine tune those microscopes in the past few years. This work presents a new fine tuning strategy of a scanning electron microscope sample table using four bar piezoelectric actuated mechanisms. The introduced paper presents an algorithm to find all possible inverse kinematics solutions of the proposed mechanism. In addition, another algorithm is presented to search for the optimal inverse kinematic solution. Both algorithms are used simultaneously by means of a simulation study to fine tune a scanning electron microscope sample table through a pre-specified circular or linear path of motion. 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| ispartof | Journal of Electrical Engineering, 2018-01, Vol.69 (1), p.24-31 |
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| language | eng |
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| source | De Gruyter Open Access Journals; EZB-FREE-00999 freely available EZB journals |
| subjects | Algorithms Electrical engineering Electron microscopes Finite element analysis four-bar mechanism Inverse kinematics inverse kinematics optimization Kinematics Mathematical models Mechanical engineering Microscopes Nanowires piezoelectric Piezoelectricity power minimization Scanning electron microscopy |
| title | Scanning electron microscope fine tuning using four-bar piezoelectric actuated mechanism |
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