Theoretical and experimental investigation of on-chip mid-infrared chalcogenide waveguide CH4 sensor based on wavelength modulation spectroscopy

Compared with direct absorption spectroscopy (DAS), wavelength modulation spectroscopy (WMS) with good ability of suppressing noise is rarely used in waveguide sensor. The influence of waveguide parameters on WMS sensing performance is required to clarify in both theory and experiment. Three mid-inf...

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