Thermal Dependency Assessment of Silicon Wafer Behaviour Oriented at Different Angles

In considering the critical role of crystal orientation and working temperature in shaping overall performance of piezoresistive pressure microsensors, this study investigates the effect of wafer orientation (i.e., crystal orientation) and working temperature on thermomechanical and fracture behavio...

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Veröffentlicht in:	Arabian journal for science and engineering (2011) 2022-07, Vol.47 (7), p.8285-8295
Hauptverfasser:	Mrad, Hatem, Elsharkawi, Ehab, Abdelaziz, Mohamed, Farid, Hicham
Format:	Artikel
Sprache:	eng
Schlagworte:	Crack initiation Crystal structure Deflection Engineering Humanities and Social Sciences Kirchhoff theory multidisciplinary Orientation effects Plate theory Pressure sensors Research Article-Mechanical Engineering Room temperature Science Silicon Silicon wafers Temperature Thermomechanical properties
Online-Zugang:	Volltext
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