Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based On Michelson Interferometer Structure

In this paper, we design a monolithic integrated micro-opto-electromechanical system(MOEMS) accelerometer based on the Michelson interferometer structure. The accelerometer realizes the on-chip integration of the mode spot converter, the sensing optical path, the phase modulator and the photonic cry...

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Veröffentlicht in:	Journal of lightwave technology 2022-07, Vol.40 (13), p.4364-4372
Hauptverfasser:	Sun, Peiji, She, Xuan, Yao, Junjie, Chen, Kan, Bi, Ran, Wang, Lei, Shu, Xiaowu
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerometer Accelerometers Beams (structural) Converters Crosstalk Crystal structure Michelson interferometers micro-opto-electro-mechanical system (MOEMS) Micro-optoelectromechanical systems optical chip sensor Optical fiber sensors Optical fibers Optical interferometry Optical modulation Optical refraction phase modulation Photonic crystals Silicon
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