Calculational Evaluation of the Adsorption–Desorption Behavior of Pyrolysis Products in GaAsxP1 –x Metalorganic Vapor Phase Epitaxy

— Density functional theory calculations have been used to determine the adsorption and desorption potentials of pyrolysis products on the substrate in the GaAs x P 1 – x /GaAs metalorganic vapor phase epitaxy process. The results have been used in kinetic Monte Carlo simulation of the behavior of t...

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Veröffentlicht in:	Inorganic materials 2022, Vol.58 (4), p.425-432
Hauptverfasser:	Maksimov, A. D., Davydkin, M. A., Bagaev, T. A., Andreev, A. Yu, Yarotskaya, I. V., Ladugin, M. A., Marmalyuk, A. A.
Format:	Artikel
Sprache:	eng
Schlagworte:	Adsorption Algorithms Chemistry Chemistry and Materials Science Computer simulation Density functional theory Desorption Industrial Chemistry/Chemical Engineering Inorganic Chemistry Materials Science Mathematical analysis Metalorganic chemical vapor deposition Pyrolysis Substrates Vapor phase epitaxy Vapor phases
Online-Zugang:	Volltext
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