Deposition and evaluation of Ta2O5 piezoelectric thin film on Pt crystal film

Tantalum pentoxide (Ta2O5) thin films were deposited on Pt(100)/Si(100) and SrRuO3(SRO)/Pt(100)/Si(100) substrates using an RF magnetron sputtering system. From the evaluated orientation and piezoelectricity of the deposited thin films, it was clarified that the Ta2O5 thin films were crystallized to...

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Veröffentlicht in:	Japanese Journal of Applied Physics 2022-07, Vol.61 (SG), p.SG1076
Hauptverfasser:	Matsuura, Keisuke, Suzuki, Masashi, Kakio, Shoji, Kodera, Masanori, Funakubo, Hiroshi
Format:	Artikel
Sprache:	eng
Schlagworte:	bulk acoustic wave Bulk acoustic wave devices Coupling Crystallization epitaxial growth Evaluation Finite element method Magnetron sputtering Piezoelectricity Silicon substrates surface acoustic wave Surface acoustic waves Ta Tantalum Tantalum oxides Thin films
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