Impact of Yb content on structural properties and ferroelectric characteristics of BiFeO3 thin films on Pt/TiN/Si substrates

This work reports the impact of Yb content on the structural and ferroelectric properties of the BiFeO 3 thin films fabricated on the Pt/TiN/Si substrates by dc and rf cosputtering. The Yb-doped BiFeO 3 thin films were prepared under three different Yb plasma powers (10 W, 11 W, 12 W). X-ray diffrac...

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Veröffentlicht in:	Applied physics. A, Materials science & processing Materials science & processing, 2022-06, Vol.128 (6), Article 503
Hauptverfasser:	Pan, Tung-Ming, Chou, Yu-Cheng, Her, Jim-Long
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied physics Atomic force microscopy Characterization and Evaluation of Materials Condensed Matter Physics Electric fields Ferroelectric materials Ferroelectricity Grain size Leakage current Machines Manufacturing Materials science Microscopy Nanotechnology Optical and Electronic Materials Photoelectrons Physics Physics and Astronomy Processes Secondary ion mass spectrometry Silicon substrates Surface roughness Surfaces and Interfaces Thin Films
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