Effect of salt precursor on laser-assisted copper deposition
Continuous copper structures were precipitated on microscope cover glasses by the laser-induced chemical liquid phase deposition (LCLD) method. The deposition of copper was realized from both CuSO4- and CuCl2-based electrolyte solutions. The surface morphology and the chemical composition of the dep...
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| Veröffentlicht in: | Applied physics. A, Materials science & processing Materials science & processing, 2007-11, Vol.89 (3), p.755-759 |
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| container_title | Applied physics. A, Materials science & processing |
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| creator | Manshina, A.A. Povolotskiy, A.V. Ivanova, T.Y. Tver’yanovich, Y.S. Tunik, S.P. Kim, D. Kim, M. Kwon, S.C. |
| description | Continuous copper structures were precipitated on microscope cover glasses by the laser-induced chemical liquid phase deposition (LCLD) method. The deposition of copper was realized from both CuSO4- and CuCl2-based electrolyte solutions. The surface morphology and the chemical composition of the deposits were analyzed with a scanning electron microscope and energy dispersive X-ray spectrometer (EDX). The dependence of the characteristics (width and resistance) of the copper deposits on the laser power, temperature and the salt precursor was examined. The observed strong influence of the solution temperature and the salt precursor on the deposits characteristics was explained by the specific chemical features of the Cu(II)→Cu(0) reduction process. |
| doi_str_mv | 10.1007/s00339-007-4164-9 |
| format | Article |
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A, Materials science & processing</title><description>Continuous copper structures were precipitated on microscope cover glasses by the laser-induced chemical liquid phase deposition (LCLD) method. The deposition of copper was realized from both CuSO4- and CuCl2-based electrolyte solutions. The surface morphology and the chemical composition of the deposits were analyzed with a scanning electron microscope and energy dispersive X-ray spectrometer (EDX). The dependence of the characteristics (width and resistance) of the copper deposits on the laser power, temperature and the salt precursor was examined. The observed strong influence of the solution temperature and the salt precursor on the deposits characteristics was explained by the specific chemical features of the Cu(II)→Cu(0) reduction process.</description><subject>Applied physics</subject><subject>Chemical composition</subject><subject>Copper</subject><subject>Copper chloride</subject><subject>Deposits</subject><subject>Lasers</subject><subject>Liquid phase deposition</subject><subject>Liquid phases</subject><subject>Materials science</subject><subject>Precursors</subject><subject>X ray spectrometers</subject><issn>0947-8396</issn><issn>1432-0630</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><recordid>eNotkE9LAzEQxYMouFY_gLeA5-jkT7Mb8CKlVqHgRc8hzU5gS93EzPbgt3dLfYd57_CYBz_G7iU8SoD2iQC0dmKOwkhrhLtgjTRaCbAaLlkDzrSi085esxuiPcwySjXseZ0SxonnxCkcJl4qxmOlXHke-SEQVhGIBpqw5zGXgpX3WDIN05DHW3aVwoHw7t8X7Ot1_bl6E9uPzfvqZSuiavUkEKyUyxgtGEzW9X2MiNCCRQkh9AqlAzQGYBflEpzatQmT03I-S6u6oBfs4fy31PxzRJr8Ph_rOE96Za3pTDdrbslzK9ZMVDH5UofvUH-9BH-C5M-Q_CmeIHmn_wDVfVnT</recordid><startdate>20071101</startdate><enddate>20071101</enddate><creator>Manshina, A.A.</creator><creator>Povolotskiy, A.V.</creator><creator>Ivanova, T.Y.</creator><creator>Tver’yanovich, Y.S.</creator><creator>Tunik, S.P.</creator><creator>Kim, D.</creator><creator>Kim, M.</creator><creator>Kwon, S.C.</creator><general>Springer Nature B.V</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20071101</creationdate><title>Effect of salt precursor on laser-assisted copper deposition</title><author>Manshina, A.A. ; Povolotskiy, A.V. ; Ivanova, T.Y. ; Tver’yanovich, Y.S. ; Tunik, S.P. ; Kim, D. ; Kim, M. ; Kwon, S.C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c273t-e06115cc604ef69ddccee0706e10aad2e190e4400bc15092b7fef931ef95628a3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Applied physics</topic><topic>Chemical composition</topic><topic>Copper</topic><topic>Copper chloride</topic><topic>Deposits</topic><topic>Lasers</topic><topic>Liquid phase deposition</topic><topic>Liquid phases</topic><topic>Materials science</topic><topic>Precursors</topic><topic>X ray spectrometers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Manshina, A.A.</creatorcontrib><creatorcontrib>Povolotskiy, A.V.</creatorcontrib><creatorcontrib>Ivanova, T.Y.</creatorcontrib><creatorcontrib>Tver’yanovich, Y.S.</creatorcontrib><creatorcontrib>Tunik, S.P.</creatorcontrib><creatorcontrib>Kim, D.</creatorcontrib><creatorcontrib>Kim, M.</creatorcontrib><creatorcontrib>Kwon, S.C.</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics. 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| subjects | Applied physics Chemical composition Copper Copper chloride Deposits Lasers Liquid phase deposition Liquid phases Materials science Precursors X ray spectrometers |
| title | Effect of salt precursor on laser-assisted copper deposition |
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