Measuring the parameters of dielectric layers by periodically charging the surface

It is shown that the parameters and characteristics of a dielectric layer can be determined by the periodic dosed deposition of a charge on the layer surface combined with the synchronous measurement of the accumulated charge and surface potential, as well as by measuring the surface potential when the layer is both freely discharged and discharged when exposed to light. The measurements data are used to plot the surface potential of the layer versus the charge density, as well as to find the dependences of the effective capacitance, differential capacitance, and leakage resistance on the surface potential. It is demonstrated that the characteristics thus obtained may provide an insight into the physics of processes occurring in the layer; determine time parameters, such as the half-value periods of the potential in the dark and under exposure to light; and find the capacitance, limiting value of the surface potential, permittivity, leakage resistance, and photosensitivity of the layer.