Thermally induced metastability of InGaAs single-layer for highly strained superlattices by metal-organic chemical vapor deposition

•Surface morphology and structural property of metastable InGaAs as relaxation.•Effect of growth temperature on the structural properties of metastable InGaAs.•Intuitive results to grow highly strained InGaAs/AlInAs superlattice. In this study, the metastability of In0.68Ga0.32As layers on InP subst...

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Veröffentlicht in:	Journal of alloys and compounds 2022-06, Vol.905, p.164252, Article 164252
Hauptverfasser:	Kang, Sooseok, Kim, Jongmin, Jang, Chan Wook, Jang, Hyunchul, Lee, Sang Tae, Lee, Byeong-hyeon, Kim, Shinkeun, Shin, Chan-Soo, Jun, Dong-Hwan
Format:	Artikel
Sprache:	eng
Schlagworte:	Dislocation Flat surfaces Hatches Lattices Metalorganic chemical vapor deposition Metastability Metastable state Misfit dislocations MOCVD Organic chemicals Organic chemistry Strain analysis Strain relaxation Substrates Superlattice Superlattices Surface morphology Surface roughness Thickness
Online-Zugang:	Volltext
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