Structural Characterization of a Short-Period Superlattice Based on the CdF2/CaF2/Si(111) Heterostructure by Transmission Electron Microscopy and X-Ray Diffractometry

A detailed study of the structure of a short-period superlattice based on alternating layers of cadmium and calcium fluorides grown by molecular beam epitaxy on a silicon substrate (111) by transmission electron microscopy and X-ray diffractometry has been performed. It has been established that the superlattice is in a pseudomorphic state and a lateral inhomogeneity with a fragment size of 10–40 nm has been found. The reason for the broadening of the main and satellite peaks of the superlattice on the diffraction curve (111) has been elucidated.