Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass
The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was m...
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| Veröffentlicht in: | Electrical engineering in Japan 2022-03, Vol.215 (1), p.n/a |
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| container_title | Electrical engineering in Japan |
| container_volume | 215 |
| creator | Onda, Naotaka Kozuka, Takaaki Abe, Takashi Isshiki, Masanobu Tomeno, Satoru Sohgawa, Masayuki |
| description | The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was measured. As a result, it is demonstrated that fabricated sensor can detect thermally difference due to differences in the surface treatment of the glass. |
| doi_str_mv | 10.1002/eej.23370 |
| format | Article |
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The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was measured. As a result, it is demonstrated that fabricated sensor can detect thermally difference due to differences in the surface treatment of the glass.</description><identifier>ISSN: 0424-7760</identifier><identifier>EISSN: 1520-6416</identifier><identifier>DOI: 10.1002/eej.23370</identifier><language>eng</language><publisher>Hoboken: Wiley Subscription Services, Inc</publisher><subject>elastomer ; Elastomers ; Glass plates ; on‐chip heater integration ; Sensors ; Surface treatment ; tactile sensor ; Tactile sensors (robotics) ; temperature sensor ; warm‐cool evaluation</subject><ispartof>Electrical engineering in Japan, 2022-03, Vol.215 (1), p.n/a</ispartof><rights>2022 Wiley Periodicals LLC</rights><rights>2022 by Wiley Periodicals LLC</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3630-4b45809e6d73d3aca0438cf9cd642affcbc533c44881cc3f7fad68c6d8e67ed3</citedby><cites>FETCH-LOGICAL-c3630-4b45809e6d73d3aca0438cf9cd642affcbc533c44881cc3f7fad68c6d8e67ed3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://onlinelibrary.wiley.com/doi/pdf/10.1002%2Feej.23370$$EPDF$$P50$$Gwiley$$H</linktopdf><linktohtml>$$Uhttps://onlinelibrary.wiley.com/doi/full/10.1002%2Feej.23370$$EHTML$$P50$$Gwiley$$H</linktohtml><link.rule.ids>314,776,780,1411,27903,27904,45553,45554</link.rule.ids></links><search><creatorcontrib>Onda, Naotaka</creatorcontrib><creatorcontrib>Kozuka, Takaaki</creatorcontrib><creatorcontrib>Abe, Takashi</creatorcontrib><creatorcontrib>Isshiki, Masanobu</creatorcontrib><creatorcontrib>Tomeno, Satoru</creatorcontrib><creatorcontrib>Sohgawa, Masayuki</creatorcontrib><title>Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass</title><title>Electrical engineering in Japan</title><description>The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was measured. As a result, it is demonstrated that fabricated sensor can detect thermally difference due to differences in the surface treatment of the glass.</description><subject>elastomer</subject><subject>Elastomers</subject><subject>Glass plates</subject><subject>on‐chip heater integration</subject><subject>Sensors</subject><subject>Surface treatment</subject><subject>tactile sensor</subject><subject>Tactile sensors (robotics)</subject><subject>temperature sensor</subject><subject>warm‐cool evaluation</subject><issn>0424-7760</issn><issn>1520-6416</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNp1kL9OwzAQhy0EEqUw8AaWmBjS2rFjuyOq0gJqxUB3y_GfNlUaFzuh6sYj8Iw8CaFBbAyn0-m-3530AXCL0QgjlI6t3Y5SQjg6AwOcpShhFLNzMEA0pQnnDF2Cqxi3CCGOuRiAMFNFKLVqSl9D7-DGqsaGr4_Psm7sOnSDgct8-QobpZuysjDaOvoAXVf2XVXtX_Kgwg6q2kDtK3PC-lVxhI1v9aas13BdqRivwYVTVbQ3v30IVrN8NX1MFi_zp-nDItGEEZTQgmYCTSwznBiitEKUCO0m2jCaKud0oTNCNKVCYK2J404ZJjQzwjJuDRmCu_7sPvi31sZGbn0b6u6jTBlhOJsITDvqvqd08DEG6-Q-lDsVjhIj-WNUdkblyWjHjnv20Ik4_g_KPH_uE99gSHpl</recordid><startdate>202203</startdate><enddate>202203</enddate><creator>Onda, Naotaka</creator><creator>Kozuka, Takaaki</creator><creator>Abe, Takashi</creator><creator>Isshiki, Masanobu</creator><creator>Tomeno, Satoru</creator><creator>Sohgawa, Masayuki</creator><general>Wiley Subscription Services, Inc</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>8FD</scope><scope>F28</scope><scope>FR3</scope><scope>L7M</scope></search><sort><creationdate>202203</creationdate><title>Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass</title><author>Onda, Naotaka ; Kozuka, Takaaki ; Abe, Takashi ; Isshiki, Masanobu ; Tomeno, Satoru ; Sohgawa, Masayuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c3630-4b45809e6d73d3aca0438cf9cd642affcbc533c44881cc3f7fad68c6d8e67ed3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>elastomer</topic><topic>Elastomers</topic><topic>Glass plates</topic><topic>on‐chip heater integration</topic><topic>Sensors</topic><topic>Surface treatment</topic><topic>tactile sensor</topic><topic>Tactile sensors (robotics)</topic><topic>temperature sensor</topic><topic>warm‐cool evaluation</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Onda, Naotaka</creatorcontrib><creatorcontrib>Kozuka, Takaaki</creatorcontrib><creatorcontrib>Abe, Takashi</creatorcontrib><creatorcontrib>Isshiki, Masanobu</creatorcontrib><creatorcontrib>Tomeno, Satoru</creatorcontrib><creatorcontrib>Sohgawa, Masayuki</creatorcontrib><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Technology Research Database</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Electrical engineering in Japan</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Onda, Naotaka</au><au>Kozuka, Takaaki</au><au>Abe, Takashi</au><au>Isshiki, Masanobu</au><au>Tomeno, Satoru</au><au>Sohgawa, Masayuki</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass</atitle><jtitle>Electrical engineering in Japan</jtitle><date>2022-03</date><risdate>2022</risdate><volume>215</volume><issue>1</issue><epage>n/a</epage><issn>0424-7760</issn><eissn>1520-6416</eissn><abstract>The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was measured. As a result, it is demonstrated that fabricated sensor can detect thermally difference due to differences in the surface treatment of the glass.</abstract><cop>Hoboken</cop><pub>Wiley Subscription Services, Inc</pub><doi>10.1002/eej.23370</doi><tpages>7</tpages></addata></record> |
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| identifier | ISSN: 0424-7760 |
| ispartof | Electrical engineering in Japan, 2022-03, Vol.215 (1), p.n/a |
| issn | 0424-7760 1520-6416 |
| language | eng |
| recordid | cdi_proquest_journals_2636159814 |
| source | Wiley Online Library Journals Frontfile Complete |
| subjects | elastomer Elastomers Glass plates on‐chip heater integration Sensors Surface treatment tactile sensor Tactile sensors (robotics) temperature sensor warm‐cool evaluation |
| title | Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass |
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