Laser Induced Dielectric Breakdown as a Novel Method for the Synthesis of Molybdenum Boride

Laser induced dielectric breakdown (LIDB) on a surface of solid Mo in H 2 /BF 3 atmosphere at 30–760 Torr and in a gaseous mixture MoF 6 /H 2 /BF 3  + at 760 Torr pressure is tested for synthesis and deposition of superhard molybdenum borides that are needed in many areas of industry and technology....

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Veröffentlicht in:Plasma chemistry and plasma processing 2022-03, Vol.42 (2), p.395-412
Hauptverfasser: A.Kornev, R., Sennikov, P. G., Gornushkin, I. B., A.Ermakov, A., Shkrunin, V. E., Polykov, V. S., Kornev, A. R., Kornev, K. D.
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Sprache:eng
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