Laser Induced Dielectric Breakdown as a Novel Method for the Synthesis of Molybdenum Boride
Laser induced dielectric breakdown (LIDB) on a surface of solid Mo in H 2 /BF 3 atmosphere at 30–760 Torr and in a gaseous mixture MoF 6 /H 2 /BF 3 + at 760 Torr pressure is tested for synthesis and deposition of superhard molybdenum borides that are needed in many areas of industry and technology....
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Veröffentlicht in: | Plasma chemistry and plasma processing 2022-03, Vol.42 (2), p.395-412 |
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