Near‐Field Mediated 40 nm In‐Volume Glass Fabrication by Femtosecond Laser

Nanofabrication techniques have significantly impelled the development of nanomechanics and nanophotonics by making nano‐precision material processing routine. Although widely employed, current sub‐100 nm nanofabrication approaches based on focused particles or light are limited to surface modificat...

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Veröffentlicht in:	Advanced optical materials 2022-02, Vol.10 (4), p.n/a
Hauptverfasser:	Yan, Zhi, Gao, Jichao, Beresna, Martynas, Zhang, Jingyu
Format:	Artikel
Sprache:	eng
Schlagworte:	Ablation Assembly Data storage Electromagnetic fields femtosecond laser Femtosecond pulses Incident light Laser beams laser materials processing Lasers Luminous intensity Materials science Nanofabrication optical data storage Optics silica glass single nanoslits Spatial resolution
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