ℓ₁ Trend Filtering-Based Change Point Detection for Pumping Line Balance of Deposition Equipment

One of the most significant manufacturing issues is how to monitor and diagnose the state of machines from various sensor data. Detecting machine state changes is very important because it can prevent machine breakdown or product quality deterioration. This work deals with a change point detection p...

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Veröffentlicht in:IEEE transactions on semiconductor manufacturing 2022-02, Vol.35 (1), p.137-145
Hauptverfasser: Ahn, Jeongsun, Kim, Duyeon, Song, Mingi, Min, Jaehong, Hwang, Jimin, Kwon, Juhye, Kim, Hyun-Jung
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Sprache:eng
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