Formation of Diamond-Like Carbon Film on Organic Substrate by High Power Impulse Magnetron Sputtering
Diamond-like carbon（DLC）film was deposited on organic substrates using highpower impulse magnetron sputtering（HiPIMS）without substrate bias voltage. The DLC film properties were evaluated using Raman spectroscopy and X-ray photoelectron spectroscopy. Results show that the sp3 contents of the DLC fil...
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| Veröffentlicht in: | Hyōmen gijutsu 2022/01/01, Vol.73(1), pp.47-52 |
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| container_title | Hyōmen gijutsu |
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| creator | OHTA, Takayuki OGUSHI, Rikuto ODA, Akinori KOUSAKA, Hiroyuki |
| description | Diamond-like carbon（DLC）film was deposited on organic substrates using highpower impulse magnetron sputtering（HiPIMS）without substrate bias voltage. The DLC film properties were evaluated using Raman spectroscopy and X-ray photoelectron spectroscopy. Results show that the sp3 contents of the DLC films on PTFE or PA6 substrates were greater than those on POM substrate. The ion energy distribution functions（IEDFs）of carbon ion and argon ion were measured using energy-resolved mass spectrometry to evaluate high-energy ion production. From HiPIMS, high-energy carbon ion with more than 30 eV was detected, whereas argon ions were distributed in the low-energy region. Comparison of the IEDFs of carbon and argon ions in HiPIMS to those obtained using direct current magnetron sputtering confirmed that higher-energy carbon ions, which contribute to increased sp3 bonding, were produced with higher intensity in HiPIMS. |
| doi_str_mv | 10.4139/sfj.73.47 |
| format | Article |
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The DLC film properties were evaluated using Raman spectroscopy and X-ray photoelectron spectroscopy. Results show that the sp3 contents of the DLC films on PTFE or PA6 substrates were greater than those on POM substrate. The ion energy distribution functions（IEDFs）of carbon ion and argon ion were measured using energy-resolved mass spectrometry to evaluate high-energy ion production. From HiPIMS, high-energy carbon ion with more than 30 eV was detected, whereas argon ions were distributed in the low-energy region. Comparison of the IEDFs of carbon and argon ions in HiPIMS to those obtained using direct current magnetron sputtering confirmed that higher-energy carbon ions, which contribute to increased sp3 bonding, were produced with higher intensity in HiPIMS.</description><identifier>ISSN: 0915-1869</identifier><identifier>EISSN: 1884-3409</identifier><identifier>DOI: 10.4139/sfj.73.47</identifier><language>eng ; jpn</language><publisher>Tokyo: The Surface Finishing Society of Japan</publisher><subject>Argon ions ; Carbon ; Diamond films ; Diamond-Like Carbon ; Diamond-like carbon films ; Direct current ; Distribution functions ; Energy ; Evaluation ; High Power Impulse Magnetron Sputtering ; Ion energy distribution ; Magnetic properties ; Magnetron sputtering ; Mass Spectrometry ; Organic Substrate ; Photoelectrons ; Raman spectroscopy ; Substrates</subject><ispartof>Journal of The Surface Finishing Society of Japan, 2022/01/01, Vol.73(1), pp.47-52</ispartof><rights>2022 by The Surface Finishing Society of Japan</rights><rights>Copyright Japan Science and Technology Agency 2022</rights><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c1907-466a8464b77638b438928d8a877ea4f0452ff638525455d3179997a98b3ff8e63</citedby><cites>FETCH-LOGICAL-c1907-466a8464b77638b438928d8a877ea4f0452ff638525455d3179997a98b3ff8e63</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,1876,27903,27904</link.rule.ids></links><search><creatorcontrib>OHTA, Takayuki</creatorcontrib><creatorcontrib>OGUSHI, Rikuto</creatorcontrib><creatorcontrib>ODA, Akinori</creatorcontrib><creatorcontrib>KOUSAKA, Hiroyuki</creatorcontrib><title>Formation of Diamond-Like Carbon Film on Organic Substrate by High Power Impulse Magnetron Sputtering</title><title>Hyōmen gijutsu</title><addtitle>Journal of The Surface Finishing Society of Japan</addtitle><description>Diamond-like carbon（DLC）film was deposited on organic substrates using highpower impulse magnetron sputtering（HiPIMS）without substrate bias voltage. The DLC film properties were evaluated using Raman spectroscopy and X-ray photoelectron spectroscopy. Results show that the sp3 contents of the DLC films on PTFE or PA6 substrates were greater than those on POM substrate. The ion energy distribution functions（IEDFs）of carbon ion and argon ion were measured using energy-resolved mass spectrometry to evaluate high-energy ion production. From HiPIMS, high-energy carbon ion with more than 30 eV was detected, whereas argon ions were distributed in the low-energy region. Comparison of the IEDFs of carbon and argon ions in HiPIMS to those obtained using direct current magnetron sputtering confirmed that higher-energy carbon ions, which contribute to increased sp3 bonding, were produced with higher intensity in HiPIMS.</description><subject>Argon ions</subject><subject>Carbon</subject><subject>Diamond films</subject><subject>Diamond-Like Carbon</subject><subject>Diamond-like carbon films</subject><subject>Direct current</subject><subject>Distribution functions</subject><subject>Energy</subject><subject>Evaluation</subject><subject>High Power Impulse Magnetron Sputtering</subject><subject>Ion energy distribution</subject><subject>Magnetic properties</subject><subject>Magnetron sputtering</subject><subject>Mass Spectrometry</subject><subject>Organic Substrate</subject><subject>Photoelectrons</subject><subject>Raman spectroscopy</subject><subject>Substrates</subject><issn>0915-1869</issn><issn>1884-3409</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNo9kMFLwzAYxYMoOOYO_gcBTx46myZtEvAi07nBZML0HNIu6TLXpiYpsv_ejOpOD977ve-DB8AtSqcEYf7g9X5K8ZTQCzBCjJEEk5RfglHKUZ4gVvBrMPHelGmW4zxDiIyAmlvXyGBsC62Gz0Y2tt0mK_Ol4Ey6Mtpzc2hg1LWrZWsquOlLH5wMCpZHuDD1Dr7bH-Xgsun6g1fwTdatCi42Nl0fgnKmrW_AlZYxnPzpGHzOXz5mi2S1fl3OnlZJhXhKE1IUkpGClJQWmJUEM56xLZOMUiWJTkmeaR2TPMtJnm8xopxzKjkrsdZMFXgM7oa7nbPfvfJB7G3v2vhSZEVGKEopppG6H6jKWe-d0qJzppHuKFAqTkOKOKSgWJAT-ziwex9krc6kdMFUB_VPogE_29VOOqFa_AsBL3rF</recordid><startdate>20220101</startdate><enddate>20220101</enddate><creator>OHTA, Takayuki</creator><creator>OGUSHI, Rikuto</creator><creator>ODA, Akinori</creator><creator>KOUSAKA, Hiroyuki</creator><general>The Surface Finishing Society of Japan</general><general>Japan Science and Technology Agency</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7SR</scope><scope>8BQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>20220101</creationdate><title>Formation of Diamond-Like Carbon Film on Organic Substrate by High Power Impulse Magnetron Sputtering</title><author>OHTA, Takayuki ; OGUSHI, Rikuto ; ODA, Akinori ; KOUSAKA, Hiroyuki</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1907-466a8464b77638b438928d8a877ea4f0452ff638525455d3179997a98b3ff8e63</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng ; jpn</language><creationdate>2022</creationdate><topic>Argon ions</topic><topic>Carbon</topic><topic>Diamond films</topic><topic>Diamond-Like Carbon</topic><topic>Diamond-like carbon films</topic><topic>Direct current</topic><topic>Distribution functions</topic><topic>Energy</topic><topic>Evaluation</topic><topic>High Power Impulse Magnetron Sputtering</topic><topic>Ion energy distribution</topic><topic>Magnetic properties</topic><topic>Magnetron sputtering</topic><topic>Mass Spectrometry</topic><topic>Organic Substrate</topic><topic>Photoelectrons</topic><topic>Raman spectroscopy</topic><topic>Substrates</topic><toplevel>online_resources</toplevel><creatorcontrib>OHTA, Takayuki</creatorcontrib><creatorcontrib>OGUSHI, Rikuto</creatorcontrib><creatorcontrib>ODA, Akinori</creatorcontrib><creatorcontrib>KOUSAKA, Hiroyuki</creatorcontrib><collection>CrossRef</collection><collection>Engineered Materials Abstracts</collection><collection>METADEX</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Hyōmen gijutsu</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>OHTA, Takayuki</au><au>OGUSHI, Rikuto</au><au>ODA, Akinori</au><au>KOUSAKA, Hiroyuki</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Formation of Diamond-Like Carbon Film on Organic Substrate by High Power Impulse Magnetron Sputtering</atitle><jtitle>Hyōmen gijutsu</jtitle><addtitle>Journal of The Surface Finishing Society of Japan</addtitle><date>2022-01-01</date><risdate>2022</risdate><volume>73</volume><issue>1</issue><spage>47</spage><epage>52</epage><pages>47-52</pages><issn>0915-1869</issn><eissn>1884-3409</eissn><abstract>Diamond-like carbon（DLC）film was deposited on organic substrates using highpower impulse magnetron sputtering（HiPIMS）without substrate bias voltage. The DLC film properties were evaluated using Raman spectroscopy and X-ray photoelectron spectroscopy. Results show that the sp3 contents of the DLC films on PTFE or PA6 substrates were greater than those on POM substrate. The ion energy distribution functions（IEDFs）of carbon ion and argon ion were measured using energy-resolved mass spectrometry to evaluate high-energy ion production. From HiPIMS, high-energy carbon ion with more than 30 eV was detected, whereas argon ions were distributed in the low-energy region. Comparison of the IEDFs of carbon and argon ions in HiPIMS to those obtained using direct current magnetron sputtering confirmed that higher-energy carbon ions, which contribute to increased sp3 bonding, were produced with higher intensity in HiPIMS.</abstract><cop>Tokyo</cop><pub>The Surface Finishing Society of Japan</pub><doi>10.4139/sfj.73.47</doi><tpages>6</tpages><oa>free_for_read</oa></addata></record> |
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| source | J-STAGE Free |
| subjects | Argon ions Carbon Diamond films Diamond-Like Carbon Diamond-like carbon films Direct current Distribution functions Energy Evaluation High Power Impulse Magnetron Sputtering Ion energy distribution Magnetic properties Magnetron sputtering Mass Spectrometry Organic Substrate Photoelectrons Raman spectroscopy Substrates |
| title | Formation of Diamond-Like Carbon Film on Organic Substrate by High Power Impulse Magnetron Sputtering |
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