Analysis and compensation for nonlinearity of sandwich MEMS capacitive accelerometer induced by fabrication process error

The effect of fabrication process error on the nonlinearity of sandwich MEMS capacitive accelerometer is analyzed in the paper. Firstly, after the packaging of the accelerometer, the displacement offset and torsion angle of the sensitive proof mass are obtained by CV testing. The gravitational field...

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Veröffentlicht in:	Microelectronic engineering 2022-01, Vol.252, p.111672, Article 111672
Hauptverfasser:	Chen, Mengjia, Zhu, Ruifeng, Lin, Youling, Zhao, Zhengqian, Che, Lufeng
Format:	Artikel
Sprache:	eng
Schlagworte:	Accelerometers Capacitance Capacitance compensation Capacitive accelerometer Coefficients Compensation Electrodes Fabrication process error Gravitational fields MEMS Microelectromechanical systems Nonlinear systems Nonlinearity
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