Polymer-derived ceramic thin-film temperature sensor

•A thin-film temperature sensor was fabricated based on polymer-derived ceramics (PDCs) via direct-writing.•A layer of protective coating made from PDC was applied on the sensor head and improved the repeatability.•The sensitivity and resistance-temperature relationship of SiCN sensor head were inve...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2021-12, Vol.332, p.113038, Article 113038
Hauptverfasser:	Cui, Zaifu, Li, Xin, Pan, Xiaochuan, Chen, Guochun, Li, Yali, Lin, Ji’an, Wu, Chao, Liu, Xianlong, Yang, Tao, Hai, Zhenyin, He, Gonghan, Chen, Qinnan, Sun, Daoheng
Format:	Artikel
Sprache:	eng
Schlagworte:	Aerospace industry Direct writing High temperature Nanoparticles Polymer-derived ceramics Polymers Room temperature Sensors Temperature dependence Temperature sensor Temperature sensors Thickness Thin film Thin films
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