Spurious-free thickness-shear bulk acoustic resonators on lithium niobate using standard and broadband piston mode designs
This paper describes the design and fabrication of spurious-free thickness-shear bulk acoustic resonators (TSBARs) using the lithium niobate (LN) plate. Previously, the authors conjected from the experiment on the TSBAR that cut-off edges with crystal LN x plane serve as ideal reflectors for the pis...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 2022-02, Vol.61 (2), p.25503 |
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| container_title | Japanese Journal of Applied Physics |
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| creator | Wu, Ting Wong, Yu-po He, Yi-wen Peng, Chuan Bao, Jing-fu Hashimoto, Ken-ya |
| description | This paper describes the design and fabrication of spurious-free thickness-shear bulk acoustic resonators (TSBARs) using the lithium niobate (LN) plate. Previously, the authors conjected from the experiment on the TSBAR that cut-off edges with crystal LN
x
plane serve as ideal reflectors for the piston mode operation, and complete suppression is possible by adding the standard piston mode design to the other edges normal to the
X
-axis. Following this conjecture, the traditional piston mode structure is designed by the traditional two-dimensional finite element method, and the TSBAR is fabricated following the design. The experiment showed complete suppression of the transverse mode resonances, and the conjecture was verified. |
| doi_str_mv | 10.35848/1347-4065/ac42ae |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_iop_j</sourceid><recordid>TN_cdi_proquest_journals_2622624561</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2622624561</sourcerecordid><originalsourceid>FETCH-LOGICAL-c344t-7ea1a2df1afcb20a82b4e2f97b9f9951c1c64fdeb531b177f764305ae74a05d73</originalsourceid><addsrcrecordid>eNp9kMlKBDEQhoMoOC4P4C3gxUtrkk66p48ibiB4UM-hsmnGmU6b6j7o05txRC8iFNT2_VXwE3LE2Wmt5nJ-xmvZVpI16gysFOC3yOxntE1mjAleyU6IXbKHuChtoySfkY-HYcoxTViF7D0dX6J97T1ihS8eMjXT8pWCLfsxWpo9ph7GlJGmni5joacV7WMyMHo6YeyfKY7QO8iOlkRNTuDMuhoijkWzSs5T5zE-93hAdgIs0R9-533ydHX5eHFT3d1f316c31W2lnKsWg8chAscgjWCwVwY6UXoWtOFrlPcctvI4LxRNTe8bUPbyJop8K0Eplxb75Pjzd0hp7fJ46gXacp9ealFI0pI1fBC8Q1lc0LMPughxxXkd82Z_rJYr_3Uaz_1xuKiqTaamIbfo__xJ3_wiwUMuuFaaCaUYrUeXKg_ASSEjlI</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2622624561</pqid></control><display><type>article</type><title>Spurious-free thickness-shear bulk acoustic resonators on lithium niobate using standard and broadband piston mode designs</title><source>Institute of Physics Journals</source><creator>Wu, Ting ; Wong, Yu-po ; He, Yi-wen ; Peng, Chuan ; Bao, Jing-fu ; Hashimoto, Ken-ya</creator><creatorcontrib>Wu, Ting ; Wong, Yu-po ; He, Yi-wen ; Peng, Chuan ; Bao, Jing-fu ; Hashimoto, Ken-ya</creatorcontrib><description>This paper describes the design and fabrication of spurious-free thickness-shear bulk acoustic resonators (TSBARs) using the lithium niobate (LN) plate. Previously, the authors conjected from the experiment on the TSBAR that cut-off edges with crystal LN
x
plane serve as ideal reflectors for the piston mode operation, and complete suppression is possible by adding the standard piston mode design to the other edges normal to the
X
-axis. Following this conjecture, the traditional piston mode structure is designed by the traditional two-dimensional finite element method, and the TSBAR is fabricated following the design. The experiment showed complete suppression of the transverse mode resonances, and the conjecture was verified.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.35848/1347-4065/ac42ae</identifier><identifier>CODEN: JJAPB6</identifier><language>eng</language><publisher>Tokyo: IOP Publishing</publisher><subject>Broadband ; Bulk acoustic wave devices ; Design ; Design standards ; Finite element method ; LiNbO3 ; Lithium niobates ; Reflectors ; Resonators ; Thickness ; transverse mode suppression ; TSBAR</subject><ispartof>Japanese Journal of Applied Physics, 2022-02, Vol.61 (2), p.25503</ispartof><rights>2022 The Japan Society of Applied Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c344t-7ea1a2df1afcb20a82b4e2f97b9f9951c1c64fdeb531b177f764305ae74a05d73</citedby><cites>FETCH-LOGICAL-c344t-7ea1a2df1afcb20a82b4e2f97b9f9951c1c64fdeb531b177f764305ae74a05d73</cites><orcidid>0000-0003-3930-6026 ; 0000-0003-4372-2786 ; 0000-0001-7377-6457 ; 0000-0003-0070-756X</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.35848/1347-4065/ac42ae/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27924,27925,53846,53893</link.rule.ids></links><search><creatorcontrib>Wu, Ting</creatorcontrib><creatorcontrib>Wong, Yu-po</creatorcontrib><creatorcontrib>He, Yi-wen</creatorcontrib><creatorcontrib>Peng, Chuan</creatorcontrib><creatorcontrib>Bao, Jing-fu</creatorcontrib><creatorcontrib>Hashimoto, Ken-ya</creatorcontrib><title>Spurious-free thickness-shear bulk acoustic resonators on lithium niobate using standard and broadband piston mode designs</title><title>Japanese Journal of Applied Physics</title><addtitle>Jpn. J. Appl. Phys</addtitle><description>This paper describes the design and fabrication of spurious-free thickness-shear bulk acoustic resonators (TSBARs) using the lithium niobate (LN) plate. Previously, the authors conjected from the experiment on the TSBAR that cut-off edges with crystal LN
x
plane serve as ideal reflectors for the piston mode operation, and complete suppression is possible by adding the standard piston mode design to the other edges normal to the
X
-axis. Following this conjecture, the traditional piston mode structure is designed by the traditional two-dimensional finite element method, and the TSBAR is fabricated following the design. The experiment showed complete suppression of the transverse mode resonances, and the conjecture was verified.</description><subject>Broadband</subject><subject>Bulk acoustic wave devices</subject><subject>Design</subject><subject>Design standards</subject><subject>Finite element method</subject><subject>LiNbO3</subject><subject>Lithium niobates</subject><subject>Reflectors</subject><subject>Resonators</subject><subject>Thickness</subject><subject>transverse mode suppression</subject><subject>TSBAR</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2022</creationdate><recordtype>article</recordtype><recordid>eNp9kMlKBDEQhoMoOC4P4C3gxUtrkk66p48ibiB4UM-hsmnGmU6b6j7o05txRC8iFNT2_VXwE3LE2Wmt5nJ-xmvZVpI16gysFOC3yOxntE1mjAleyU6IXbKHuChtoySfkY-HYcoxTViF7D0dX6J97T1ihS8eMjXT8pWCLfsxWpo9ph7GlJGmni5joacV7WMyMHo6YeyfKY7QO8iOlkRNTuDMuhoijkWzSs5T5zE-93hAdgIs0R9-533ydHX5eHFT3d1f316c31W2lnKsWg8chAscgjWCwVwY6UXoWtOFrlPcctvI4LxRNTe8bUPbyJop8K0Eplxb75Pjzd0hp7fJ46gXacp9ealFI0pI1fBC8Q1lc0LMPughxxXkd82Z_rJYr_3Uaz_1xuKiqTaamIbfo__xJ3_wiwUMuuFaaCaUYrUeXKg_ASSEjlI</recordid><startdate>20220201</startdate><enddate>20220201</enddate><creator>Wu, Ting</creator><creator>Wong, Yu-po</creator><creator>He, Yi-wen</creator><creator>Peng, Chuan</creator><creator>Bao, Jing-fu</creator><creator>Hashimoto, Ken-ya</creator><general>IOP Publishing</general><general>Japanese Journal of Applied Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0003-3930-6026</orcidid><orcidid>https://orcid.org/0000-0003-4372-2786</orcidid><orcidid>https://orcid.org/0000-0001-7377-6457</orcidid><orcidid>https://orcid.org/0000-0003-0070-756X</orcidid></search><sort><creationdate>20220201</creationdate><title>Spurious-free thickness-shear bulk acoustic resonators on lithium niobate using standard and broadband piston mode designs</title><author>Wu, Ting ; Wong, Yu-po ; He, Yi-wen ; Peng, Chuan ; Bao, Jing-fu ; Hashimoto, Ken-ya</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c344t-7ea1a2df1afcb20a82b4e2f97b9f9951c1c64fdeb531b177f764305ae74a05d73</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2022</creationdate><topic>Broadband</topic><topic>Bulk acoustic wave devices</topic><topic>Design</topic><topic>Design standards</topic><topic>Finite element method</topic><topic>LiNbO3</topic><topic>Lithium niobates</topic><topic>Reflectors</topic><topic>Resonators</topic><topic>Thickness</topic><topic>transverse mode suppression</topic><topic>TSBAR</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Wu, Ting</creatorcontrib><creatorcontrib>Wong, Yu-po</creatorcontrib><creatorcontrib>He, Yi-wen</creatorcontrib><creatorcontrib>Peng, Chuan</creatorcontrib><creatorcontrib>Bao, Jing-fu</creatorcontrib><creatorcontrib>Hashimoto, Ken-ya</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Wu, Ting</au><au>Wong, Yu-po</au><au>He, Yi-wen</au><au>Peng, Chuan</au><au>Bao, Jing-fu</au><au>Hashimoto, Ken-ya</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Spurious-free thickness-shear bulk acoustic resonators on lithium niobate using standard and broadband piston mode designs</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><addtitle>Jpn. J. Appl. Phys</addtitle><date>2022-02-01</date><risdate>2022</risdate><volume>61</volume><issue>2</issue><spage>25503</spage><pages>25503-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><coden>JJAPB6</coden><abstract>This paper describes the design and fabrication of spurious-free thickness-shear bulk acoustic resonators (TSBARs) using the lithium niobate (LN) plate. Previously, the authors conjected from the experiment on the TSBAR that cut-off edges with crystal LN
x
plane serve as ideal reflectors for the piston mode operation, and complete suppression is possible by adding the standard piston mode design to the other edges normal to the
X
-axis. Following this conjecture, the traditional piston mode structure is designed by the traditional two-dimensional finite element method, and the TSBAR is fabricated following the design. The experiment showed complete suppression of the transverse mode resonances, and the conjecture was verified.</abstract><cop>Tokyo</cop><pub>IOP Publishing</pub><doi>10.35848/1347-4065/ac42ae</doi><tpages>6</tpages><orcidid>https://orcid.org/0000-0003-3930-6026</orcidid><orcidid>https://orcid.org/0000-0003-4372-2786</orcidid><orcidid>https://orcid.org/0000-0001-7377-6457</orcidid><orcidid>https://orcid.org/0000-0003-0070-756X</orcidid></addata></record> |
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| language | eng |
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| source | Institute of Physics Journals |
| subjects | Broadband Bulk acoustic wave devices Design Design standards Finite element method LiNbO3 Lithium niobates Reflectors Resonators Thickness transverse mode suppression TSBAR |
| title | Spurious-free thickness-shear bulk acoustic resonators on lithium niobate using standard and broadband piston mode designs |
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