Investigation of Morphology of Aluminum Co-Doped Scandium Stabilized Zirconia (ScAlSZ) Thin Films

The morphology of aluminum co-doped scandium stabilized zirconia (ScAlSZ) thin films formed by e-beam deposition system was investigated experimentally and theoretically. The dependencies of surface roughness, and the films’ structure on deposition temperature and deposition rate were analyzed. It w...

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Veröffentlicht in:	Coatings (Basel) 2022-01, Vol.12 (1), p.31
Hauptverfasser:	Galdikas, Arvaidas, Sriubas, Mantas, Kairaitis, Gediminas, Virbukas, Darius, Bockute, Kristina, Galdikas, Matas, Moskalioviene, Teresa, Laukaitis, Giedrius
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Conductivity Deposition Electrolytes Electron beams Grain boundaries Influence Islands Mathematical analysis Mathematical models Nanocomposites Nanoparticles Phase separation Scandium Substrates Surface roughness Thin films Zirconium Zirconium dioxide Zirconium oxides
Online-Zugang:	Volltext
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