An In-Run Automatic Mode-Matching Method for N = 3 MEMS Disk Resonator Gyroscope

This paper demonstrates an in-run automatic mode-matching method for a Micro-Electro-Mechanical systems (MEMS) disk resonator gyroscope (DRG) operating in the n = 3 wineglass mode. In proposed method, two sideband signals whose frequencies are located at both sides of the drive mode symmetrically, a...

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Veröffentlicht in:	IEEE sensors journal 2021-12, Vol.21 (24), p.27601-27611
Hauptverfasser:	Zhou, Yi, Ren, Jingbo, Liu, Mengxiang, Zhou, Tong, Su, Yan
Format:	Artikel
Sprache:	eng
Schlagworte:	Amplitudes Compensation Coriolis force DRG Electrodes electrostatic tuning Electrostatics Error reduction Gyroscopes Matching MEMS Microelectromechanical systems Micromechanical devices mode-matching n = 3 wineglass mode Resonators sideband signal Silicon Tuning
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