Nanoimprinting of magnetic FeCo-based metallic glass thin films

•Nanoscale patterns were imprinted on FeCo-based metallic glass thin films.•A large mold fill factor was achieved for the imprinted patterns.•The thin-film magnetic properties were tailored by crystallization and the patterns. The ability to create submicron/nanoscale patterns with magnetic alloys a...

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Veröffentlicht in:	Journal of magnetism and magnetic materials 2022-01, Vol.542, p.168455, Article 168455
Hauptverfasser:	Liang, Xiaoyu, Sharma, Parmanand, Zhang, Yan, Kato, Hidemi
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous materials Anisotropy Coercivity Crystal structure Crystallinity Low cost Magnetic alloys Magnetic metallic glass Magnetic properties Magnetic saturation Magnetic thin films Magnetism Magnetization reversal Memory devices Metallic glasses Nano-molding Nanoimprinting technique Rare-earth free magnet Thin film Thin films Workability
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