Reference marks recognition during automated sample positioning in probe microscopy

The article is devoted to automating the positioning of the scanning probe microscope into the marked zone using the reference marks. To recognize the reference marks, template matching was used. As a comparison measure, a cross-correlation function was used. A processing scheme has been developed t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Gulyaev, Pavel, Shelkovnikov, Evgeny
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Algorithms Automation Correlation analysis Cross correlation Filtration Process parameters Scanning probe microscopes Searching Template matching
Online-Zugang:	Volltext
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