Effect of bimaterial microcantilever physical dimensions on photothermal sensing characteristics

•The role of physical dimensions of bimaterial microcantilevers (BMCs) on their photothermal response is investigated.•Sensitivity of BMCs increases with decreasing width by length ratio (W/L) but at the cost of deterioration in response time.•These results are explained on the basis of decrease in...

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Veröffentlicht in:	Sensors and actuators. A. Physical. 2021-11, Vol.331, p.113039, Article 113039
Hauptverfasser:	Ramaiah, M. Raghu, Prabakar, K.
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Bimaterial microcantilever Heat transfer Lasers Noise Noise sensitivity Physical dimensions Response time S/N ratio Sensors Silicon Stiffness Studies Thermal conductivity Thermomechanical sensitivity Ultraviolet lasers Vibration
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