Superconducting planar filter design
Superconducting planar resonators of thin molybdenum carbide (MoC) films were fabricated by optical lithography. The films were deposited via reactive magnetron sputtering and by changing the deposition parameters, the sheet resistance of the films was varied. The microwave properties of the resonat...
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| creator | Baránek, Martin Neilinger, Pavol Manca, Daniel Grajcar, Miroslav |
| description | Superconducting planar resonators of thin molybdenum carbide (MoC) films were fabricated by optical lithography. The films were deposited via reactive magnetron sputtering and by changing the deposition parameters, the sheet resistance of the films was varied. The microwave properties of the resonators were studied by broadband coplanar waveguide spectroscopy in flip-chip configuration. The kinetic inductance of MoC films governs the high frequency response of the resonators and is determined by the complex conductivity of the superconducting film. Well below the critical temperature of transition, kinetic inductance is proportional to film sheet resistance in normal state. The temperature-dependent resonances in the broadband spectra below critical temperature are described by a lumped LC model, where the inductance consists of geometric and kinetic inductance of the resonator. The temperature and frequency dependent complex conductivity of the superconducting film is calculated by the Dynes model for dirty superconductors. Furthermore, a numerical model of the kinetic planar resonator in Sonnet software is presented, which can be utilized to design resonators with desired properties, based on highly disordered superconductors. An on-chip design of a kinetic planar resonator filter is presented. The high kinetic inductance of the superconducting films allows us to minimize microwave filter dimensions. |
| doi_str_mv | 10.1063/5.0067634 |
| format | Conference Proceeding |
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The films were deposited via reactive magnetron sputtering and by changing the deposition parameters, the sheet resistance of the films was varied. The microwave properties of the resonators were studied by broadband coplanar waveguide spectroscopy in flip-chip configuration. The kinetic inductance of MoC films governs the high frequency response of the resonators and is determined by the complex conductivity of the superconducting film. Well below the critical temperature of transition, kinetic inductance is proportional to film sheet resistance in normal state. The temperature-dependent resonances in the broadband spectra below critical temperature are described by a lumped LC model, where the inductance consists of geometric and kinetic inductance of the resonator. The temperature and frequency dependent complex conductivity of the superconducting film is calculated by the Dynes model for dirty superconductors. Furthermore, a numerical model of the kinetic planar resonator in Sonnet software is presented, which can be utilized to design resonators with desired properties, based on highly disordered superconductors. An on-chip design of a kinetic planar resonator filter is presented. The high kinetic inductance of the superconducting films allows us to minimize microwave filter dimensions.</description><identifier>ISSN: 0094-243X</identifier><identifier>EISSN: 1551-7616</identifier><identifier>DOI: 10.1063/5.0067634</identifier><identifier>CODEN: APCPCS</identifier><language>eng</language><publisher>Melville: American Institute of Physics</publisher><subject>Broadband ; Coplanar waveguides ; Critical temperature ; Electrical resistivity ; Filter design (mathematics) ; Frequency response ; Inductance ; Magnetron sputtering ; Microwave filters ; Molybdenum carbide ; Numerical models ; Resonators ; Spectrum analysis ; Superconducting films ; Superconductivity ; Superconductors ; Temperature dependence ; Thin films ; Transition temperature</subject><ispartof>AIP conference proceedings, 2021, Vol.2411 (1)</ispartof><rights>Author(s)</rights><rights>2021 Author(s). 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The films were deposited via reactive magnetron sputtering and by changing the deposition parameters, the sheet resistance of the films was varied. The microwave properties of the resonators were studied by broadband coplanar waveguide spectroscopy in flip-chip configuration. The kinetic inductance of MoC films governs the high frequency response of the resonators and is determined by the complex conductivity of the superconducting film. Well below the critical temperature of transition, kinetic inductance is proportional to film sheet resistance in normal state. The temperature-dependent resonances in the broadband spectra below critical temperature are described by a lumped LC model, where the inductance consists of geometric and kinetic inductance of the resonator. The temperature and frequency dependent complex conductivity of the superconducting film is calculated by the Dynes model for dirty superconductors. Furthermore, a numerical model of the kinetic planar resonator in Sonnet software is presented, which can be utilized to design resonators with desired properties, based on highly disordered superconductors. An on-chip design of a kinetic planar resonator filter is presented. The high kinetic inductance of the superconducting films allows us to minimize microwave filter dimensions.</description><subject>Broadband</subject><subject>Coplanar waveguides</subject><subject>Critical temperature</subject><subject>Electrical resistivity</subject><subject>Filter design (mathematics)</subject><subject>Frequency response</subject><subject>Inductance</subject><subject>Magnetron sputtering</subject><subject>Microwave filters</subject><subject>Molybdenum carbide</subject><subject>Numerical models</subject><subject>Resonators</subject><subject>Spectrum analysis</subject><subject>Superconducting films</subject><subject>Superconductivity</subject><subject>Superconductors</subject><subject>Temperature dependence</subject><subject>Thin films</subject><subject>Transition temperature</subject><issn>0094-243X</issn><issn>1551-7616</issn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2021</creationdate><recordtype>conference_proceeding</recordtype><recordid>eNp9kE1LxDAYhIMoWFcP_oOCnoSu75s0X0dZ_IIFDyp4C0nTLF1qG9NW8N_bZRe8eRqYeZiBIeQSYYkg2C1fAggpWHlEMuQcCylQHJMMQJcFLdnHKTkbhi0A1VKqjFy_TrFOVd_5qRqbbpPH1nY25aFpxzrlvh6aTXdOToJth_rioAvy_nD_tnoq1i-Pz6u7dRGpUmOhqONcyYoyVtIQApVKaQoeEO2cgbBeOI2OM8ocRVTcObmzvNYOpWILcrXvjan_muphNNt-St08aSjXKKkEWc7UzZ4aqma0Y9N3Jqbm06Yfg2B2LxhuDi_8B3_36Q800Qf2C3eDWys</recordid><startdate>20211102</startdate><enddate>20211102</enddate><creator>Baránek, Martin</creator><creator>Neilinger, Pavol</creator><creator>Manca, Daniel</creator><creator>Grajcar, Miroslav</creator><general>American Institute of Physics</general><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20211102</creationdate><title>Superconducting planar filter design</title><author>Baránek, Martin ; Neilinger, Pavol ; Manca, Daniel ; Grajcar, Miroslav</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-p288t-82b5587c23342fff2788920d011a82b06ad6b91b5323b21185bb7d6b9d99b1783</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Broadband</topic><topic>Coplanar waveguides</topic><topic>Critical temperature</topic><topic>Electrical resistivity</topic><topic>Filter design (mathematics)</topic><topic>Frequency response</topic><topic>Inductance</topic><topic>Magnetron sputtering</topic><topic>Microwave filters</topic><topic>Molybdenum carbide</topic><topic>Numerical models</topic><topic>Resonators</topic><topic>Spectrum analysis</topic><topic>Superconducting films</topic><topic>Superconductivity</topic><topic>Superconductors</topic><topic>Temperature dependence</topic><topic>Thin films</topic><topic>Transition temperature</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Baránek, Martin</creatorcontrib><creatorcontrib>Neilinger, Pavol</creatorcontrib><creatorcontrib>Manca, Daniel</creatorcontrib><creatorcontrib>Grajcar, Miroslav</creatorcontrib><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Baránek, Martin</au><au>Neilinger, Pavol</au><au>Manca, Daniel</au><au>Grajcar, Miroslav</au><au>Vajda, Ján</au><au>Sitek, Jozef</au><au>Jamnický, Igor</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Superconducting planar filter design</atitle><btitle>AIP conference proceedings</btitle><date>2021-11-02</date><risdate>2021</risdate><volume>2411</volume><issue>1</issue><issn>0094-243X</issn><eissn>1551-7616</eissn><coden>APCPCS</coden><abstract>Superconducting planar resonators of thin molybdenum carbide (MoC) films were fabricated by optical lithography. The films were deposited via reactive magnetron sputtering and by changing the deposition parameters, the sheet resistance of the films was varied. The microwave properties of the resonators were studied by broadband coplanar waveguide spectroscopy in flip-chip configuration. The kinetic inductance of MoC films governs the high frequency response of the resonators and is determined by the complex conductivity of the superconducting film. Well below the critical temperature of transition, kinetic inductance is proportional to film sheet resistance in normal state. The temperature-dependent resonances in the broadband spectra below critical temperature are described by a lumped LC model, where the inductance consists of geometric and kinetic inductance of the resonator. The temperature and frequency dependent complex conductivity of the superconducting film is calculated by the Dynes model for dirty superconductors. Furthermore, a numerical model of the kinetic planar resonator in Sonnet software is presented, which can be utilized to design resonators with desired properties, based on highly disordered superconductors. An on-chip design of a kinetic planar resonator filter is presented. The high kinetic inductance of the superconducting films allows us to minimize microwave filter dimensions.</abstract><cop>Melville</cop><pub>American Institute of Physics</pub><doi>10.1063/5.0067634</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0094-243X |
| ispartof | AIP conference proceedings, 2021, Vol.2411 (1) |
| issn | 0094-243X 1551-7616 |
| language | eng |
| recordid | cdi_proquest_journals_2591727074 |
| source | American Institute of Physics (AIP) Journals |
| subjects | Broadband Coplanar waveguides Critical temperature Electrical resistivity Filter design (mathematics) Frequency response Inductance Magnetron sputtering Microwave filters Molybdenum carbide Numerical models Resonators Spectrum analysis Superconducting films Superconductivity Superconductors Temperature dependence Thin films Transition temperature |
| title | Superconducting planar filter design |
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