Ultrathin rock-salt type NbN films grown on atomically flat AlN/sapphire substrates

•An ultrathin NbN film on AlN exhibits a step-and-terrace structure on the surface.•The NbN exhibited distinct streaky RHEED patterns and reasonable XRD diffraction.•The Tc of the 7-nm-thick NbN was 11.3 K. In this study, we grew NbN(111) films on AlN(0001)/sapphire substrates by sputtering and inve...

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Veröffentlicht in:	Journal of crystal growth 2021-10, Vol.572, p.126269, Article 126269
Hauptverfasser:	Kobayashi, Atsushi, Ueno, Kohei, Fujioka, Hiroshi
Format:	Artikel
Sprache:	eng
Schlagworte:	A1. High resolution X-ray diffraction A1. Reflection high energy electron diffraction A3. Physical vapor deposition processes B1. Nitrides B2. Semiconducting III-V materials B2. Superconducting materials Electrical properties Electron diffraction High energy electrons Niobium nitride Sapphire Substrates Superconductivity Transition temperature
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