Multibeam Electron Source using MEMS Electron Optical Components

Recent developments in electron beam equipment have given rise to ever more complex electron optical (EO) designs. Until now these designs were realized using standard workshop techniques like drilling, turning etc. With the need for even more complex designs to advance electron optics, we use the p...

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Veröffentlicht in:	Journal of physics. Conference series 2006-04, Vol.34 (1), p.1092-1097
Hauptverfasser:	Someren, B van, Bruggen, M J van, Zhang, Y, Hagen, C W, Kruit, P
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron beams Electron microscopes Electron optics Manufacturing Nanolithography Optical components Physics
Online-Zugang:	Volltext bestellen
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