Comparative analysis of microactuators fabricated by femtosecond and nanosecond laser micromachining
Laser micromachining technology is a cost-effective microfabrication technique for prototyping and in some cases batch production of miniature components and microdevices with complex geometries requiring high accuracy and precision. The objective of this paper is to analyze experimentally the effec...
Gespeichert in:
| Veröffentlicht in: | Journal of physics. Conference series 2007-04, Vol.59 (1), p.700-703 |
|---|---|
| Hauptverfasser: | , , |
| Format: | Artikel |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 703 |
|---|---|
| container_issue | 1 |
| container_start_page | 700 |
| container_title | Journal of physics. Conference series |
| container_volume | 59 |
| creator | Bordatchev, E V Lai, Y Nikumb, S K |
| description | Laser micromachining technology is a cost-effective microfabrication technique for prototyping and in some cases batch production of miniature components and microdevices with complex geometries requiring high accuracy and precision. The objective of this paper is to analyze experimentally the effect of the laser micromachining process and its parameters, particularly, the pulse duration, on the characteristics of the fabricated functional microdevices. This was achieved through the microfabrication of two electro-thermally driven in-plane microactuators using a femtosecond and a nanosecond pulse laser. The dynamic/static performance of the microactuators was compared with respect to the required current/power and generated actuation force/displacement and the geometric quality of the machining. |
| doi_str_mv | 10.1088/1742-6596/59/1/148 |
| format | Article |
| fullrecord | <record><control><sourceid>proquest_O3W</sourceid><recordid>TN_cdi_proquest_journals_2580630069</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>2580630069</sourcerecordid><originalsourceid>FETCH-LOGICAL-c391t-3d12f3508d9b62d27758334dde0a16b9229b30b3535aa18c1a66f534f1fe46f3</originalsourceid><addsrcrecordid>eNqNkE1LxDAQhoMouK7-AU8BTx5q89GkzVEWv2DBy97DtEk0y7apSSvsv7dLVQQ9OJf54HmHmRehS0puKKmqnJYFy6RQMhcqpzktqiO0-B4e_6hP0VlKW0L4FOUCmVVoe4gw-HeLoYPdPvmEg8Otb2KAZhhhCDFhB3X0DQzW4HqPnW2HkGwTOjOJDO6g-2p3kGyc1S00r77z3cs5OnGwS_biMy_R5v5us3rM1s8PT6vbddZwRYeMG8ocF6QyqpbMsLIUFeeFMZYAlbViTNWc1FxwAUCrhoKUTvDCUWcL6fgSXc1r-xjeRpsGvQ1jnH5KmomKSE6IVBPFZmq6MKVone6jbyHuNSX6YKY-eKUPXmmhNNWTmZMom0U-9P_jr__gf3G6N45_AOFagz0</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2580630069</pqid></control><display><type>article</type><title>Comparative analysis of microactuators fabricated by femtosecond and nanosecond laser micromachining</title><source>Institute of Physics Open Access Journal Titles</source><creator>Bordatchev, E V ; Lai, Y ; Nikumb, S K</creator><creatorcontrib>Bordatchev, E V ; Lai, Y ; Nikumb, S K</creatorcontrib><description>Laser micromachining technology is a cost-effective microfabrication technique for prototyping and in some cases batch production of miniature components and microdevices with complex geometries requiring high accuracy and precision. The objective of this paper is to analyze experimentally the effect of the laser micromachining process and its parameters, particularly, the pulse duration, on the characteristics of the fabricated functional microdevices. This was achieved through the microfabrication of two electro-thermally driven in-plane microactuators using a femtosecond and a nanosecond pulse laser. The dynamic/static performance of the microactuators was compared with respect to the required current/power and generated actuation force/displacement and the geometric quality of the machining.</description><identifier>ISSN: 1742-6596</identifier><identifier>ISSN: 1742-6588</identifier><identifier>EISSN: 1742-6596</identifier><identifier>DOI: 10.1088/1742-6596/59/1/148</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Actuation ; Batch production ; Femtosecond pulsed lasers ; Geometric accuracy ; Laser machining ; Lasers ; Microactuators ; Micromachining ; Nanosecond pulses ; Physics ; Process parameters ; Prototyping ; Pulse duration</subject><ispartof>Journal of physics. Conference series, 2007-04, Vol.59 (1), p.700-703</ispartof><rights>Copyright IOP Publishing Apr 2007</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c391t-3d12f3508d9b62d27758334dde0a16b9229b30b3535aa18c1a66f534f1fe46f3</citedby><cites>FETCH-LOGICAL-c391t-3d12f3508d9b62d27758334dde0a16b9229b30b3535aa18c1a66f534f1fe46f3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/1742-6596/59/1/148/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,1553,27628,27924,27925,53904,53931</link.rule.ids><linktorsrc>$$Uhttp://iopscience.iop.org/1742-6596/59/1/148$$EView_record_in_IOP_Publishing$$FView_record_in_$$GIOP_Publishing</linktorsrc></links><search><creatorcontrib>Bordatchev, E V</creatorcontrib><creatorcontrib>Lai, Y</creatorcontrib><creatorcontrib>Nikumb, S K</creatorcontrib><title>Comparative analysis of microactuators fabricated by femtosecond and nanosecond laser micromachining</title><title>Journal of physics. Conference series</title><description>Laser micromachining technology is a cost-effective microfabrication technique for prototyping and in some cases batch production of miniature components and microdevices with complex geometries requiring high accuracy and precision. The objective of this paper is to analyze experimentally the effect of the laser micromachining process and its parameters, particularly, the pulse duration, on the characteristics of the fabricated functional microdevices. This was achieved through the microfabrication of two electro-thermally driven in-plane microactuators using a femtosecond and a nanosecond pulse laser. The dynamic/static performance of the microactuators was compared with respect to the required current/power and generated actuation force/displacement and the geometric quality of the machining.</description><subject>Actuation</subject><subject>Batch production</subject><subject>Femtosecond pulsed lasers</subject><subject>Geometric accuracy</subject><subject>Laser machining</subject><subject>Lasers</subject><subject>Microactuators</subject><subject>Micromachining</subject><subject>Nanosecond pulses</subject><subject>Physics</subject><subject>Process parameters</subject><subject>Prototyping</subject><subject>Pulse duration</subject><issn>1742-6596</issn><issn>1742-6588</issn><issn>1742-6596</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2007</creationdate><recordtype>article</recordtype><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNqNkE1LxDAQhoMouK7-AU8BTx5q89GkzVEWv2DBy97DtEk0y7apSSvsv7dLVQQ9OJf54HmHmRehS0puKKmqnJYFy6RQMhcqpzktqiO0-B4e_6hP0VlKW0L4FOUCmVVoe4gw-HeLoYPdPvmEg8Otb2KAZhhhCDFhB3X0DQzW4HqPnW2HkGwTOjOJDO6g-2p3kGyc1S00r77z3cs5OnGwS_biMy_R5v5us3rM1s8PT6vbddZwRYeMG8ocF6QyqpbMsLIUFeeFMZYAlbViTNWc1FxwAUCrhoKUTvDCUWcL6fgSXc1r-xjeRpsGvQ1jnH5KmomKSE6IVBPFZmq6MKVone6jbyHuNSX6YKY-eKUPXmmhNNWTmZMom0U-9P_jr__gf3G6N45_AOFagz0</recordid><startdate>20070401</startdate><enddate>20070401</enddate><creator>Bordatchev, E V</creator><creator>Lai, Y</creator><creator>Nikumb, S K</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>H8D</scope><scope>HCIFZ</scope><scope>L7M</scope><scope>P5Z</scope><scope>P62</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope></search><sort><creationdate>20070401</creationdate><title>Comparative analysis of microactuators fabricated by femtosecond and nanosecond laser micromachining</title><author>Bordatchev, E V ; Lai, Y ; Nikumb, S K</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c391t-3d12f3508d9b62d27758334dde0a16b9229b30b3535aa18c1a66f534f1fe46f3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Actuation</topic><topic>Batch production</topic><topic>Femtosecond pulsed lasers</topic><topic>Geometric accuracy</topic><topic>Laser machining</topic><topic>Lasers</topic><topic>Microactuators</topic><topic>Micromachining</topic><topic>Nanosecond pulses</topic><topic>Physics</topic><topic>Process parameters</topic><topic>Prototyping</topic><topic>Pulse duration</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Bordatchev, E V</creatorcontrib><creatorcontrib>Lai, Y</creatorcontrib><creatorcontrib>Nikumb, S K</creatorcontrib><collection>CrossRef</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Central (Alumni Edition)</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies & Aerospace Collection</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>Aerospace Database</collection><collection>SciTech Premium Collection</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>Advanced Technologies & Aerospace Database</collection><collection>ProQuest Advanced Technologies & Aerospace Collection</collection><collection>Access via ProQuest (Open Access)</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><jtitle>Journal of physics. Conference series</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Bordatchev, E V</au><au>Lai, Y</au><au>Nikumb, S K</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Comparative analysis of microactuators fabricated by femtosecond and nanosecond laser micromachining</atitle><jtitle>Journal of physics. Conference series</jtitle><date>2007-04-01</date><risdate>2007</risdate><volume>59</volume><issue>1</issue><spage>700</spage><epage>703</epage><pages>700-703</pages><issn>1742-6596</issn><issn>1742-6588</issn><eissn>1742-6596</eissn><abstract>Laser micromachining technology is a cost-effective microfabrication technique for prototyping and in some cases batch production of miniature components and microdevices with complex geometries requiring high accuracy and precision. The objective of this paper is to analyze experimentally the effect of the laser micromachining process and its parameters, particularly, the pulse duration, on the characteristics of the fabricated functional microdevices. This was achieved through the microfabrication of two electro-thermally driven in-plane microactuators using a femtosecond and a nanosecond pulse laser. The dynamic/static performance of the microactuators was compared with respect to the required current/power and generated actuation force/displacement and the geometric quality of the machining.</abstract><cop>Bristol</cop><pub>IOP Publishing</pub><doi>10.1088/1742-6596/59/1/148</doi><tpages>4</tpages><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1742-6596 |
| ispartof | Journal of physics. Conference series, 2007-04, Vol.59 (1), p.700-703 |
| issn | 1742-6596 1742-6588 1742-6596 |
| language | eng |
| recordid | cdi_proquest_journals_2580630069 |
| source | Institute of Physics Open Access Journal Titles |
| subjects | Actuation Batch production Femtosecond pulsed lasers Geometric accuracy Laser machining Lasers Microactuators Micromachining Nanosecond pulses Physics Process parameters Prototyping Pulse duration |
| title | Comparative analysis of microactuators fabricated by femtosecond and nanosecond laser micromachining |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-19T06%3A26%3A20IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_O3W&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Comparative%20analysis%20of%20microactuators%20fabricated%20by%20femtosecond%20and%20nanosecond%20laser%20micromachining&rft.jtitle=Journal%20of%20physics.%20Conference%20series&rft.au=Bordatchev,%20E%20V&rft.date=2007-04-01&rft.volume=59&rft.issue=1&rft.spage=700&rft.epage=703&rft.pages=700-703&rft.issn=1742-6596&rft.eissn=1742-6596&rft_id=info:doi/10.1088/1742-6596/59/1/148&rft_dat=%3Cproquest_O3W%3E2580630069%3C/proquest_O3W%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=2580630069&rft_id=info:pmid/&rfr_iscdi=true |