$X-ray Photoelectron Diffraction Study of bias-treatment for the growth of 1-inch-diameter Hetero-Epitaxial diamond (001) thick films$

X-ray Photoelectron Diffraction Study of bias-treatment for the growth of 1-inch-diameter Hetero-Epitaxial diamond (001) thick films

Bias-treatment (BT) is widely used as an initial seeding process of chemical vapor deposition (CVD) growth of diamonds. In a BT, substrates are negatively biased by an order of hundred volts so that positive ions in the plasma of CVD gas source bombard the substrate to form 'seeds' of diam...

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Veröffentlicht in:	Journal of physics. Conference series 2010-06, Vol.235 (1), p.012010
Hauptverfasser:	Kono, S, Kawata, H, Goto, T, Abukawa, T, Chigira, K, Ooyama, K, Kotaki, T, Sawabe, A
Format:	Artikel
Sprache:	eng
Schlagworte:	Bias Chemical vapor deposition Diameters Diamond films Diamonds Diffraction patterns Epitaxial growth Infrared spectroscopy Photoelectrons Physics Positive ions Spectrum analysis Substrates Thick films X ray photoelectron spectroscopy
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