Study on effective laser cleaning method to remove carbon layer from a gold surface

Hydrocarbon cracking and carbon contamination is a common problem in soft x-ray Synchrotron Radiation (SR) beamlines. Carbon contamination on optics is known to absorb and scatter radiation close to the C K-edge (284 eV) spectral region. The purpose of this work is to study and develop a laser clean...

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Veröffentlicht in:Journal of physics. Conference series 2013-03, Vol.425 (15), p.152020, Article 152020
Hauptverfasser: Singh, Amol, Choubey, A K, Modi, Mohammed H, Upadhyaya, B N, Lodha, G S
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container_end_page
container_issue 15
container_start_page 152020
container_title Journal of physics. Conference series
container_volume 425
creator Singh, Amol
Choubey, A K
Modi, Mohammed H
Upadhyaya, B N
Lodha, G S
description Hydrocarbon cracking and carbon contamination is a common problem in soft x-ray Synchrotron Radiation (SR) beamlines. Carbon contamination on optics is known to absorb and scatter radiation close to the C K-edge (284 eV) spectral region. The purpose of this work is to study and develop a laser cleaning method that can effectively remove the carbon contaminations without damaging the underneath gold-coated optics. The laser cleaning process is a non-contact, accurate, efficient and safe. Nd:YAG laser of 100 ns pulse duration is used for carbon cleaning. The effect of laser pulse duration, laser fluence, number of laser passes, angle of incidence and spot overlapping on the cleaning performance is studied. Cleaning effect and subsequent film quality after laser irradiation is analyzed using x-ray photoelectron spectroscopy (XPS) and soft x-ray reflectivity (SXR) techniques.
doi_str_mv 10.1088/1742-6596/425/15/152020
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subjects Carbon
Cleaning
Contamination
Fluence
Gold
Gold coatings
Incidence angle
Lasers
Neodymium lasers
Photoelectrons
Physics
Pulse duration
Radiation
Semiconductor lasers
Soft x rays
Synchrotron radiation
Synchrotrons
X ray photoelectron spectroscopy
YAG lasers
title Study on effective laser cleaning method to remove carbon layer from a gold surface
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