Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique

Vertical graphene, which belongs to nanomaterials, is a very promising tool for improving the useful properties of long-used and proven materials. Since the growth of vertical graphene is different on each base material and has specific deposition setting parameters, it is necessary to examine each...

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Veröffentlicht in:Coatings (Basel) 2021-09, Vol.11 (9), p.1108
Hauptverfasser: Polzer, Ales, Sedlak, Josef, Sedlacek, Jan, Benes, Libor, Mouralova, Katerina
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container_end_page
container_issue 9
container_start_page 1108
container_title Coatings (Basel)
container_volume 11
creator Polzer, Ales
Sedlak, Josef
Sedlacek, Jan
Benes, Libor
Mouralova, Katerina
description Vertical graphene, which belongs to nanomaterials, is a very promising tool for improving the useful properties of long-used and proven materials. Since the growth of vertical graphene is different on each base material and has specific deposition setting parameters, it is necessary to examine each base material separately. For this reason, a full factor design of experiment was performed with 26 = 64 rounds, which contained additional 5 central points, i.e., a total of 69 rounds of individual experiments, which was to examine the effect of input factors Temperature, Pressure, Flow, CH4, Plasma Power, and Annealing in H2 on the growth of vertical graphene on aluminum alloy AlCu4Mg. The deposition was performed using plasma-enhanced chemical vapor deposition (PECVD) technology. Mainly, the occurrence of graphene was analyzed, which was confirmed by Raman spectroscopy, as well as its thickness. The characterization was performed using electron and transmission microscopy, including an atomic force microscope. It was found that the growth of graphene occurred in 7 cases and its thickness is affected only by the interaction flow (sccm) × pretreatment H2 (sccm).
doi_str_mv 10.3390/coatings11091108
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subjects Aluminum alloys
Aluminum base alloys
Atomic force microscopes
Atomic force microscopy
Carbon
Chemical bonds
Chemical vapor deposition
Design factors
Design of experiments
Graphene
Mechanical properties
Morphology
Nanomaterials
Packaging industry
Plasma
Plasma enhanced chemical vapor deposition
Raman spectroscopy
Spectrum analysis
Temperature effects
Tensile strength
Thickness
title Vertical Graphene Growth on AlCu4Mg Alloy by PECVD Technique
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