Synthesis of indium tin oxide films from ethyl acetoacetonato complexes at low temperatures

A novel recycling system for indium in indium tin oxide (ITO), which comprises the dissolution of indium oxide (In 2 O 3 ), chlorination, chelation, and steaming treatment, was established. Indium trichloride (InCl 3 ) was quantitatively synthesized by the reaction of In 2 O 3 with hydrochloric acid...

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Veröffentlicht in:Journal of sol-gel science and technology 2021-10, Vol.100 (1), p.68-73
Hauptverfasser: Gunji, Takahiro, Nakamura, Kotoe, Hayami, Ryohei, Aimi, Akihisa, Fujimoto, Kenjiro, Yamamoto, Kazuki
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container_issue 1
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container_title Journal of sol-gel science and technology
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creator Gunji, Takahiro
Nakamura, Kotoe
Hayami, Ryohei
Aimi, Akihisa
Fujimoto, Kenjiro
Yamamoto, Kazuki
description A novel recycling system for indium in indium tin oxide (ITO), which comprises the dissolution of indium oxide (In 2 O 3 ), chlorination, chelation, and steaming treatment, was established. Indium trichloride (InCl 3 ) was quantitatively synthesized by the reaction of In 2 O 3 with hydrochloric acid (HCl) and furnished tris(ethyl acetoacetato)indium (In(etac) 3 ) in a high yield by a subsequent reaction with ethyl acetoacetate (Hetac). In(etac) 3 was mixed with bis(acetylacetonato)tin dichloride (Sn(acac) 2 Cl 2 ) and spin coated on a glass plate, followed by steaming and heating to obtain ITO films containing 10 wt% tin oxide. In 2 O 3 was crystallized in c-, rh-, and o-In 2 O 3 . This film showed a resistivity of 9.7 Ωcm and a transparency of 86%. Highlights ITO films were prepared from In(etac) 3 and Sn(acac) 2 Cl 2 . Steaming and heating treatments were performed to remove organic ligands. In 2 O 3 was recycled by chlorination, chelation, and heating.
doi_str_mv 10.1007/s10971-021-05618-7
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Indium trichloride (InCl 3 ) was quantitatively synthesized by the reaction of In 2 O 3 with hydrochloric acid (HCl) and furnished tris(ethyl acetoacetato)indium (In(etac) 3 ) in a high yield by a subsequent reaction with ethyl acetoacetate (Hetac). In(etac) 3 was mixed with bis(acetylacetonato)tin dichloride (Sn(acac) 2 Cl 2 ) and spin coated on a glass plate, followed by steaming and heating to obtain ITO films containing 10 wt% tin oxide. In 2 O 3 was crystallized in c-, rh-, and o-In 2 O 3 . This film showed a resistivity of 9.7 Ωcm and a transparency of 86%. Highlights ITO films were prepared from In(etac) 3 and Sn(acac) 2 Cl 2 . Steaming and heating treatments were performed to remove organic ligands. 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Indium trichloride (InCl 3 ) was quantitatively synthesized by the reaction of In 2 O 3 with hydrochloric acid (HCl) and furnished tris(ethyl acetoacetato)indium (In(etac) 3 ) in a high yield by a subsequent reaction with ethyl acetoacetate (Hetac). In(etac) 3 was mixed with bis(acetylacetonato)tin dichloride (Sn(acac) 2 Cl 2 ) and spin coated on a glass plate, followed by steaming and heating to obtain ITO films containing 10 wt% tin oxide. In 2 O 3 was crystallized in c-, rh-, and o-In 2 O 3 . This film showed a resistivity of 9.7 Ωcm and a transparency of 86%. Highlights ITO films were prepared from In(etac) 3 and Sn(acac) 2 Cl 2 . Steaming and heating treatments were performed to remove organic ligands. In 2 O 3 was recycled by chlorination, chelation, and heating.</abstract><cop>New York</cop><pub>Springer US</pub><doi>10.1007/s10971-021-05618-7</doi><tpages>6</tpages></addata></record>
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subjects Ceramics
Chelation
Chemical synthesis
Chemistry and Materials Science
Chlorides
Chlorination
Composites
Crystallization
Dichlorides
Glass
Glass plates
Heating
Hydrochloric acid
Indium oxides
Indium tin oxides
Inorganic Chemistry
Low temperature
Materials Science
Nanotechnology
Natural Materials
Optical and Electronic Materials
Original Paper: Fundamentals of sol-gel and hybrid materials processing
Oxide coatings
Steaming
Tin
title Synthesis of indium tin oxide films from ethyl acetoacetonato complexes at low temperatures
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