Precise mass detector based on "W needle - C nanowire" nanomechanical system

Nanomechanical system (NMS) based on amorphous carbon nanowhiskers localized on the top of tungsten tip were fabricated and investigated. The whiskers were grown in the scanning electron microscope (SEM) chamber using focused electron beam technique. The manipulation of SiO2 and TiO2 nanospheres was...

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Veröffentlicht in:Journal of physics. Conference series 2016-08, Vol.741 (1), p.12207
Hauptverfasser: Lukashenko, S Y, Komissarenko, F E, Mukhin, I S, Lysak, V V, Averkiev, D A, Sapozhnikov, I D, Golubok, A O
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container_issue 1
container_start_page 12207
container_title Journal of physics. Conference series
container_volume 741
creator Lukashenko, S Y
Komissarenko, F E
Mukhin, I S
Lysak, V V
Averkiev, D A
Sapozhnikov, I D
Golubok, A O
description Nanomechanical system (NMS) based on amorphous carbon nanowhiskers localized on the top of tungsten tip were fabricated and investigated. The whiskers were grown in the scanning electron microscope (SEM) chamber using focused electron beam technique. The manipulation of SiO2 and TiO2 nanospheres was provided in SEM by means of dielectrophoretic force. Oscillation trajectories and amplitude-frequency characteristic of the oscillator were visualized at low pressure using a scanning electron microscope. The estimation of mass sensitivity of NMS was conducted.
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subjects Dielectrophoresis
Electron beams
Electron microscopes
Low pressure
Nanospheres
Nanowires
Physics
Scanning electron microscopy
Silicon dioxide
Titanium dioxide
title Precise mass detector based on "W needle - C nanowire" nanomechanical system
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