Formation of high intensity ion beams with ballistic focusing

This investigation presents the results of experimental investigation and theoretical simulations of the influence of plasma and negative bias parameters on formation, transportation and focusing of high intensity ion beams of titanium and nitrogen (with an ion current density up to 1 A/cm2 and puls...

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Veröffentlicht in:	Journal of physics. Conference series 2017-11, Vol.927 (1), p.12082
Hauptverfasser:	Koval, T.V., Ryabchikov, A.I., Shevelev, A.E., Tran My Kim, An, Tarakanov, V. P.
Format:	Artikel
Sprache:	eng
Schlagworte:	Focusing Ion beams Ion current density Ion currents Physics Space charge
Online-Zugang:	Volltext
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