Comparative studies of metal‐organic decomposed GaxCeyOz and CeO2 based functional MOS capacitor

Summary A comparison between metal‐organic decomposed GaxCeyOz and CeO2 passivation layers subjected to post‐deposition annealing at 800°C in oxygen ambient was presented. Mitigation in the formation of positively charged oxygen vacancies in GaxCeyOz layer was disclosed by the grazing incidence X‐ra...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	International journal of energy research 2021-10, Vol.45 (12), p.18257-18261
Hauptverfasser:	Tan, Kar Yeow, Megat Abdul Hedei, Puteri Haslinda, Mohd Zabidi, Ainita Rozati, Ahmad, Farah Hayati, Abdul Shekkeer, Kammutty Musliyarakath, Lau, Khai Shenn, Lim, Way Foong, Hassan, Zainuriah, Quah, Hock Jin
Format:	Artikel
Sprache:	eng
Schlagworte:	capacitor cerium oxide Cerium oxides Comparative analysis Comparative studies Current density Decomposition gallium Leakage current Metals metal‐organic decomposition Mitigation MOS Oxygen spin coating
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!