Ion-beam modification of metastable gallium oxide polymorphs

•Structural changes revealed in α + ε(κ)-phase Ga2O3 under Al+ ion irradiation.•Interpretation of new X-ray diffraction peaks after irradiation is twofold.•Either phase transition or strain can be ion-induced in metastable Ga2O3. Structural changes under the action of Al+ irradiation have been inves...

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Veröffentlicht in:	Materials letters 2021-11, Vol.302, p.130346, Article 130346
Hauptverfasser:	Tetelbaum, David, Nikolskaya, Alena, Korolev, Dmitry, Mullagaliev, Timur, Belov, Alexey, Trushin, Vladimir, Dudin, Yuri, Nezhdanov, Alexey, Mashin, Aleksandr, Mikhaylov, Alexey, Pechnikov, Alexey, Scheglov, Michael, Nikolaev, Vladimir, Gogova, Daniela
Format:	Artikel
Sprache:	eng
Schlagworte:	Beta phase Epitaxial growth Gallium oxide Gallium oxides Inclusions Ion beams Ion implantation Ion irradiation Irradiation Materials science Metastable phases Phase transformations Phase transitions Radiation-stimulated strain Sapphire Vapor phase epitaxy Vapor phases
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