Development of local catalytic centers positioning technology for carbon nanotubes growth

The paper presents the results of developing positioning catalytic centers technology for the local growth of carbon nanotubes using non-standard techniques of nanometer resolution lithography explosive. It is shown that using of ZnO as a sacrificial layer is promising for the formation of nanoscale catalytic centers, as well as actuality of using focused ion beam as a lithographic tool. An array of local catalytic centers with a diameter of 35 nm, completely repeating the given topology, suitable for the growth of carbon nanotubes is obtained. The obtained results can be used for developing technological processes formation of nano- and microelectronic structures, nano- and microsystems based on single or local CNTs arrays.