The influence of substrate temperature on the tribo- mechanical properties of chromium nitride thin films

Different nitrides such as titanium nitride, chromium nitride and so on are used in a widespread range of applications such as cutting tools, medical implants, and microelectromechanical devices and all that due to their mechanical, physical and chemical properties. The aim of this study is to obtai...

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Veröffentlicht in:	IOP conference series. Materials Science and Engineering 2016-08, Vol.147 (1), p.12020
Hauptverfasser:	Merie, V V, Negrea, G, Modi, E
Format:	Artikel
Sprache:	eng
Schlagworte:	Argon Atomic force microscopy Buffer layers Chemical properties Chromium nitride Cutting tools Deposition Magnetron sputtering Mechanical properties Microelectromechanical systems Microscopy Room temperature Silicon substrates Surgical implants Thin films Titanium nitride Tribology
Online-Zugang:	Volltext
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