41.2: Invited Paper: Crystal Control of Amorphous Silicon by Laser Annealing Using Blue Laser Diode

We will proposed new silicon crystallization annealing technology using blue laser diode, proprietary optic fiber transfer and optic projection system. The new optical system produces rectangle top‐hat‐shaped irradiation onto substrate surface. By the new system, the heating and cooling can be contr...

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Veröffentlicht in:	SID International Symposium Digest of technical papers 2021-08, Vol.52 (S2), p.501-504
Hauptverfasser:	Yang, Y, Kosugi, J, Kinoshita, M, Toriyama, S, Saito, K, Sawai, T, Sasaki, N, Gotoh, J, Sugimoto, S
Format:	Artikel
Sprache:	eng
Schlagworte:	Amorphous silicon Blue Laser Diode Carrier mobility Crystallization Laser beam annealing Lasers Lateral Optical Fiber Semiconductor lasers Silicon Single crystals Substrates TFT
Online-Zugang:	Volltext
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