Highly efficient diamond electromechanical transducer based on released metal–oxide–semiconductor structure

We propose and demonstrate an efficient, integrated, and customizable metal–oxide–semiconductor (MOS) actuator capable of active on-chip driving and tuning microelectromechanical resonators. A single-crystal diamond mechanical resonator with a hydrogen-terminated surface was utilized for demonstrati...

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Veröffentlicht in:	Applied physics letters 2021-08, Vol.119 (7)
Hauptverfasser:	Liao, Meiyong, Sang, Liwen, Sun, Huanying, Li, Tiefu, Koizumi, Satoshi
Format:	Artikel
Sprache:	eng
Schlagworte:	Actuation Actuators Air gaps Applied physics Depletion Diamonds Electrical junctions Metal oxide semiconductors P-n junctions Piezoelectricity Resonators Single crystals
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