Development of CeO2-HfO2 Mixed Oxide Thin Films for High Performance Oxygen Sensors

In this work, the authors report the fabrication and characterization of CeO 2 -HfO 2 mixed oxide thin film based oxygen gas sensors. The atomic concentrations of the individual elements Ce and Hf in the mixed oxide (CeO 2 -HfO 2 ) thin films were controlled and tuned using a novel method in RF sput...

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Veröffentlicht in:	IEEE sensors journal 2021-08, Vol.21 (16), p.18326-18333
Hauptverfasser:	Ramshanker, N., Ganapathi, Kolla Lakshmi, Varun, N., Bhat, M. S., Mohan, S.
Format:	Artikel
Sprache:	eng
Schlagworte:	Cerium oxide Cerium oxides fast response time Gas detectors Gas sensors Hafnium oxide high sensitivity Low temperature mixed oxides Oxide coatings Oxygen probes RF sputtering Sensors Sputtering Surface energy Temperature sensors thickness optimization thin film oxygen sensor Thin films Time factors X ray photoelectron spectroscopy
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