Etching technology in formation of self-organized aluminum mesh for sensor and display applications

The paper describes the investigations the temperature and concentration influence on etching of nanoporous alumina in technology of production of self-organized aluminum mesh for sensor and display applications. The pyramidal aluminum meshes was obtained by anodizing of thin film sputtered on sodiu...

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Veröffentlicht in:	IOP conference series. Materials Science and Engineering 2019-02, Vol.475 (1), p.12030
Hauptverfasser:	Zhylinski, V, Bagamazava, N, Bezborodov, V, Smirnov, A, Chernik, A, Zharski, I
Format:	Artikel
Sprache:	eng
Schlagworte:	Aluminum Aluminum oxide Chemical etching Chromic acid Etching Indium tin oxides Morphology Oxalic acid Oxide coatings Thin films
Online-Zugang:	Volltext
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