Design and fabrication of terahertz quantum cascade laser with double metal waveguide based on multilayer GaAs/AlGaAs heterostructures
We have designed multilayer heterostructure (MH) based on three quantum well GaAs/Al0.15Ga0.85As active module with diagonal transitions and optimized oscillator strength - 0.425. Furthermore, we have developed a method for the fabrication of terahertz quantum cascade laser (THz QCL) with double met...
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| Veröffentlicht in: | IOP conference series. Materials Science and Engineering 2019-02, Vol.475 (1), p.12020 |
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| container_title | IOP conference series. Materials Science and Engineering |
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| creator | Khabibullin, R A Shchavruk, N V Pavlov, A Yu Klochkov, A N Glinskiy, I A Tomosh, K N Ponomarev, D S Cirlin, G E Zhukov, A E |
| description | We have designed multilayer heterostructure (MH) based on three quantum well GaAs/Al0.15Ga0.85As active module with diagonal transitions and optimized oscillator strength - 0.425. Furthermore, we have developed a method for the fabrication of terahertz quantum cascade laser (THz QCL) with double metal waveguide via low-temperature In-Au wafer bonding followed by SI-GaAs substrate removal. ICP RIE in BCl3/Ar has been used to obtain laser ridges (widths 50-200 mkm) with vertical sidewalls. We investigate the dependence of the MH energy band structure on the electric field and thermal properties of terahertz quantum cascade lasers (THz QCL) under different operation conditions. |
| doi_str_mv | 10.1088/1757-899X/475/1/012020 |
| format | Article |
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Furthermore, we have developed a method for the fabrication of terahertz quantum cascade laser (THz QCL) with double metal waveguide via low-temperature In-Au wafer bonding followed by SI-GaAs substrate removal. ICP RIE in BCl3/Ar has been used to obtain laser ridges (widths 50-200 mkm) with vertical sidewalls. We investigate the dependence of the MH energy band structure on the electric field and thermal properties of terahertz quantum cascade lasers (THz QCL) under different operation conditions.</description><identifier>ISSN: 1757-8981</identifier><identifier>ISSN: 1757-899X</identifier><identifier>EISSN: 1757-899X</identifier><identifier>DOI: 10.1088/1757-899X/475/1/012020</identifier><language>eng</language><publisher>Bristol: IOP Publishing</publisher><subject>Boron chlorides ; Electric fields ; Energy bands ; Gallium arsenide ; Gold ; Heterostructures ; Lasers ; Low temperature ; Multilayers ; Quantum cascade lasers ; Quantum wells ; Silicon substrates ; Thermodynamic properties ; Waveguides</subject><ispartof>IOP conference series. Materials Science and Engineering, 2019-02, Vol.475 (1), p.12020</ispartof><rights>Published under licence by IOP Publishing Ltd</rights><rights>2019. This work is published under http://creativecommons.org/licenses/by/3.0/ (the “License”). Notwithstanding the ProQuest Terms and Conditions, you may use this content in accordance with the terms of the License.</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c3220-ac890c848bf0c2061928e3685d71bf18f13d2677b38001444db6424f2fe55cb23</citedby><cites>FETCH-LOGICAL-c3220-ac890c848bf0c2061928e3685d71bf18f13d2677b38001444db6424f2fe55cb23</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.1088/1757-899X/475/1/012020/pdf$$EPDF$$P50$$Giop$$Hfree_for_read</linktopdf><link.rule.ids>314,777,781,27905,27906,38849,38871,53821,53848</link.rule.ids></links><search><creatorcontrib>Khabibullin, R A</creatorcontrib><creatorcontrib>Shchavruk, N V</creatorcontrib><creatorcontrib>Pavlov, A Yu</creatorcontrib><creatorcontrib>Klochkov, A N</creatorcontrib><creatorcontrib>Glinskiy, I A</creatorcontrib><creatorcontrib>Tomosh, K N</creatorcontrib><creatorcontrib>Ponomarev, D S</creatorcontrib><creatorcontrib>Cirlin, G E</creatorcontrib><creatorcontrib>Zhukov, A E</creatorcontrib><title>Design and fabrication of terahertz quantum cascade laser with double metal waveguide based on multilayer GaAs/AlGaAs heterostructures</title><title>IOP conference series. 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We investigate the dependence of the MH energy band structure on the electric field and thermal properties of terahertz quantum cascade lasers (THz QCL) under different operation conditions.</description><subject>Boron chlorides</subject><subject>Electric fields</subject><subject>Energy bands</subject><subject>Gallium arsenide</subject><subject>Gold</subject><subject>Heterostructures</subject><subject>Lasers</subject><subject>Low temperature</subject><subject>Multilayers</subject><subject>Quantum cascade lasers</subject><subject>Quantum wells</subject><subject>Silicon substrates</subject><subject>Thermodynamic properties</subject><subject>Waveguides</subject><issn>1757-8981</issn><issn>1757-899X</issn><issn>1757-899X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2019</creationdate><recordtype>article</recordtype><sourceid>O3W</sourceid><sourceid>ABUWG</sourceid><sourceid>AFKRA</sourceid><sourceid>AZQEC</sourceid><sourceid>BENPR</sourceid><sourceid>CCPQU</sourceid><sourceid>DWQXO</sourceid><recordid>eNqFkF1LwzAUhosoOKd_QQLeeDObpGmbXo45pzDxQgXvQpomW0e_lg_H_AH-blMqE0Hw6gTO874nPEFwieANgpSGKI3TCc2yt5CkcYhCiDDE8CgYHRbHhzdFp8GZMRsIk5QQOAo-b6UpVw3gTQEUz3UpuC3bBrQKWKn5Wmr7AbaON9bVQHAjeCFBxY3UYFfaNShal1cS1NLyCuz4u1y50hO5Jwrge2pX2bLie88v-NSE06ofYC19e2usdsI6Lc15cKJ4ZeTF9xwHr3fzl9n9ZPm0eJhNlxMRYQwnXNAMCkporqDAMEEZpjJKaFykKFeIKhQVOEnTPKIQIkJIkScEE4WVjGOR42gcXA29nW63ThrLNq3TjT_JcJxAGkcooZ5KBkr4PxotFet0WXO9Zwiy3jnrdbJeLfPOGWKDcx_EQ7Bsu5_mf0PXf4Qen-e_MNYVKvoCMwSSSg</recordid><startdate>20190218</startdate><enddate>20190218</enddate><creator>Khabibullin, R A</creator><creator>Shchavruk, N V</creator><creator>Pavlov, A Yu</creator><creator>Klochkov, A N</creator><creator>Glinskiy, I A</creator><creator>Tomosh, K N</creator><creator>Ponomarev, D S</creator><creator>Cirlin, G E</creator><creator>Zhukov, A E</creator><general>IOP Publishing</general><scope>O3W</scope><scope>TSCCA</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>8FE</scope><scope>8FG</scope><scope>ABJCF</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>CCPQU</scope><scope>D1I</scope><scope>DWQXO</scope><scope>HCIFZ</scope><scope>KB.</scope><scope>L6V</scope><scope>M7S</scope><scope>PDBOC</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>PTHSS</scope></search><sort><creationdate>20190218</creationdate><title>Design and fabrication of terahertz quantum cascade laser with double metal waveguide based on multilayer GaAs/AlGaAs heterostructures</title><author>Khabibullin, R A ; 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| subjects | Boron chlorides Electric fields Energy bands Gallium arsenide Gold Heterostructures Lasers Low temperature Multilayers Quantum cascade lasers Quantum wells Silicon substrates Thermodynamic properties Waveguides |
| title | Design and fabrication of terahertz quantum cascade laser with double metal waveguide based on multilayer GaAs/AlGaAs heterostructures |
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