Polymer surface modification using He/O2 RF remote low‐pressure plasma

In this study, He/O2 plasma mixture, induced in a radio frequency (RF) low‐pressure remote plasma system, has been characterized and employed for polymer surface modification. Actinometry optical emission spectroscopy (AOES) and Langmuir probe techniques were used to evaluate the plasma active speci...

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Veröffentlicht in:	Surface and interface analysis 2021-09, Vol.53 (9), p.754-761
Hauptverfasser:	Saloum, Saker, Abou Shaker, Samer, Alwazzeh, Moneer, Hussin, Rokayya
Format:	Artikel
Sprache:	eng
Schlagworte:	Actinometry AFM AOES Atomic force microscopy Atomic oxygen Chemical composition Emission analysis He/O2 mixture Langmuir probe Morphology Optical emission spectroscopy Oxygen plasma Photoelectrons Plasma Polyethylenes polymer surface modification Polymers Polymethyl methacrylate Polystyrene resins Polytetrafluoroethylene Polyvinyl chloride Radio frequency RF remote plasma Spectrum analysis X ray photoelectron spectroscopy XPS
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