Reprint of: Electron probe microanalysis: A review of recent developments and applications in materials science and engineering

Electron probe microanalysis (EPMA) is a microanalytical technique widely used for the characterization of materials. Since its development in the 1950s, different instrumental and analytical developments have been made with the aim of improving the capabilities of the technique. EPMA has utilized c...

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Veröffentlicht in:	Progress in materials science 2021-07, Vol.120, p.100818, Article 100818
Hauptverfasser:	Llovet, Xavier, Moy, Aurélien, Pinard, Philippe T., Fournelle, John H.
Format:	Artikel
Sprache:	eng
Schlagworte:	Electron beams Electron probe microanalysis Gas detectors Materials science Spectral resolution Spectrometers Thin films
Online-Zugang:	Volltext
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