Investigation of the wake-up process and time-dependent imprint of Hf0.5Zr0.5O2 film through the direct piezoelectric response

Ferroelectric HfO2-based thin films, which have been attracting a great deal attention because of their potential use in various applications, are known for their unique properties, such as a large time-dependent imprint and wake-up effect, which differentiate them from conventional ferroelectric ma...

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Veröffentlicht in:Applied physics letters 2021-07, Vol.119 (3)
Hauptverfasser: Takada, Kenshi, Murase, Mikio, Migita, Shinji, Morita, Yukinori, Ota, Hiroyuki, Fujimura, Norifumi, Yoshimura, Takeshi
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Sprache:eng
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