Temperature dependence of Young's modulus of single-crystal diamond determined by dynamic resonance

Young's modulus is a key parameter for mechanical engineering and always performs a significant role in materials design. Diamond has been regarded as an ideal material for MEMS devices and can be used in complex environments, which requires a quantitative and accurate measurement of the Young's modulus. However, as a material with outstanding mechanical rigidity and chemical inertness, the wide temperature dependent Young's modulus of single-crystal diamond (SCD) is rarely reported. In this paper, the Young's modulus of (100) oriented SCD from room temperature to 700 °C is determined experimentally and theoretically by dynamic resonance frequency method based on SCD MEMS cantilevers and first-principles calculation. The dependence of the Young's modulus of SCD is obtained by the resonance frequencies shift of the SCD cantilevers. The results show that despite different residual stress in each measured cantilever, the Young's modulus of SCD versus temperature obeys the same model as temperature increases from room temperature to 700 °C, consistent with the results calculated from the first-principles calculation. This research proposes a convenient and accurate method to measure the dependence of SCD Young's modulus on temperature, which provides a valuable reference for the advanced development of SCD MEMS and other mechanical applications. [Display omitted] •High quality diamond-on-diamond cantilevers are fabricated by smart-cut method.•Young's modulus of SCD at room temperature is determined by micro-cantilever.•Temperature dependent Young's modulus is determined by resonance frequencies shift.•First-principles calculation is performed to verify experimental results.