Tension analysis and fluctuation control of diamond multi-wire sawing machine

During the use of diamond multi-wire sawing machine, tension of diamond wire has an important impact on the quality of silicon wafer. In this paper, ADAMS is used to simulate the tension of diamond wire during the operation of machine, and results are verified by experiments. The general law of tens...

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Veröffentlicht in:International journal of advanced manufacturing technology 2021-07, Vol.115 (5-6), p.1387-1397
Hauptverfasser: Liu, Chongning, Qiu, Jian, Zhao, Siyu
Format: Artikel
Sprache:eng
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Zusammenfassung:During the use of diamond multi-wire sawing machine, tension of diamond wire has an important impact on the quality of silicon wafer. In this paper, ADAMS is used to simulate the tension of diamond wire during the operation of machine, and results are verified by experiments. The general law of tension fluctuation of diamond wire in the operation of diamond multi-wire sawing machine is obtained, and the methods of controlling tension fluctuation are put forward. The proposed method is verified by simulation and experiments, and the conclusion of controlling tension fluctuation is obtained. It is helpful to reduce the broken probability of diamond wire, prolong the service life of diamond wire, and improve the use efficiency of diamond wire.
ISSN:0268-3768
1433-3015
DOI:10.1007/s00170-021-07208-x